Abstract:Recently, new quantum features have been observed and studied in the area of nanostructured layers. Nanograting on the surface of the thin layer imposes additional boundary conditions on the electron wave function and induces G-doping or geometry doping. Gdoping is equivalent to donor doping from the point of view of the increase in electron concentration n. However, there are no ionized impurities. This preserves charge carrier scattering to the intrinsic semiconductor level and increases carrier mobility wit… Show more
“…Present developments in nanotechnology enable patterning of semiconductor layers in to gratings with periods much smaller than 1 μm . In our previous works, we have made such structures in Si layers . We have shown that these so‐called nanogratings (NGs) exhibit strongly modified electronic, thermoelectric, optical, and electron emission properties, if their sizes becomes comparable to de Broglie wavelength of electrons.…”
Experimental measurements of low-temperature electron transport across Si nanogratings with 200 nm period are reported. The structure is fabricated of silicon on insulator layer using laser interference lithography followed by reactive ion etching. For transport measurements, macroscopic Hall bar formed in the patterned layer is used. The main result is negative magnetoresistance observed for temperatures lower than 60 K and not saturating in magnetic fields up to 9 Tesla. It is interpreted in terms of weak localization suppression and fit the magnetoresistance curves by both the two-dimensional and three-dimensional theoretical models. Surprisingly, both models describe satisfactorily the data and thus the problem of dimensionality remains unsettled. However, obtained values of the phase coherence lengths are significantly smaller than both the nanograting period and layer thickness, indicating that the dominant scattering mechanism is not result of the nanostructure geometry.
“…Present developments in nanotechnology enable patterning of semiconductor layers in to gratings with periods much smaller than 1 μm . In our previous works, we have made such structures in Si layers . We have shown that these so‐called nanogratings (NGs) exhibit strongly modified electronic, thermoelectric, optical, and electron emission properties, if their sizes becomes comparable to de Broglie wavelength of electrons.…”
Experimental measurements of low-temperature electron transport across Si nanogratings with 200 nm period are reported. The structure is fabricated of silicon on insulator layer using laser interference lithography followed by reactive ion etching. For transport measurements, macroscopic Hall bar formed in the patterned layer is used. The main result is negative magnetoresistance observed for temperatures lower than 60 K and not saturating in magnetic fields up to 9 Tesla. It is interpreted in terms of weak localization suppression and fit the magnetoresistance curves by both the two-dimensional and three-dimensional theoretical models. Surprisingly, both models describe satisfactorily the data and thus the problem of dimensionality remains unsettled. However, obtained values of the phase coherence lengths are significantly smaller than both the nanograting period and layer thickness, indicating that the dominant scattering mechanism is not result of the nanostructure geometry.
“…Thus, NG introduction profoundly changes photoluminescence properties of Si above the energy gap. In the light of the works by Tavkhelidze et al [5][6][7][8] the observed changes can plausibly be explained by G-doping effect. At the same time, along with metallization due to G-doping, involvement of surface plasmons or, more exactly, plasmon polaritons is possible and can additionally be considered to account for the observed photoluminescence emerging above the energy gap of Si.…”
Section: Sample Preparation and Characterizationmentioning
confidence: 75%
“…We used saturated value of the ratio to estimate phonon gas temperature that is found from the relation I aÀst =I St ¼ expðÀ hv=K B TÞ [18]. According to our estimations, the drop (if any) in the temperature of phonons, expected in the case of G-doping [5] does not exceed 3 K below the ambient temperature (3K). However, more Raman observations, especially for Raman spectra taken with excitation energies from transparency region of Si (i.e., below the energy gap) are necessary to come to a definite conclusion.…”
Section: Sample Preparation and Characterizationmentioning
confidence: 99%
“…1 Introduction Resent developments in nanotechnology have enabled the fabrication of small size periodic structures [1][2][3][4]. One of such structures, namely nanograting (NG) layers have been shown to dramatically change the electronic [5], thermoelectric [6], and electron emission properties [7] when the grating dimensions become comparable with the de Broglie wavelength. This is due to the additional boundary conditions imposed by a NG on the wave function.…”
Nanogratings (NGs) on the surface of the top Si layer of a Si/SiO2/ substrate device structure were prepared using laser interference lithography. Electron transport, photoluminescence, and Raman scattering were then studied on the plain Si and NG Si structures to see the effect of NG introduction. As a result of NG‐introduction and very likely G‐doping maintenance, all samples studied in this work displayed a 2 to 3 order of magnitude reduction in resistivity for NG Si. The Hall coefficient indicated that electrons are main charge carriers that is also expected for exactly G‐doping. Plain Si layer did not show any photoluminescence either for 532 nm (2.38 eV) or 325 nm (3.81 eV) laser excitation. A broad photoluminescence band, composed of a number of almost equidistant peaks was observed on NG Si layer between the photon energies 1.5 and 3.5 eV. Both Stocks and anti‐Stocks components for 522.65 cm−1 phonons at room temperature were observed in the Raman spectra of NG Si layer. Estimated from the ratio between the intensities of Stocks and anti‐Stocks components, the drop (if any) in phonon gas temperature below ambient (295 K) does not exceed 3 K.
“…1 Introduction Noticeable metallization of semiconductor thin layers with nano-grating has recently been disclosed and accounted for the increased number of conduction electrons due to depression of the occupied quantum states in the systems with nano-grating [1,2]. It is important to mention that above increase in conduction electron concentration, or so-called geometry-induced doping (G-doping) results from re-arrangement in electron eigenstates.…”
Spectroscopic ellipsometry has been applied at room temperature to a multilayer device structure with plain and nanograting‐embedded Si layer on the top. In both cases, the real and imaginary parts of the complex dielectric function of the top layer have been retrieved. In nanograting case, ellipsometric data were collected in planar diffraction geometry. A profound change in dielectric function in the photon energy region between 1.5 and 3.5 eV is established for nanograting‐embedded Si layer compared to plain Si layer. Both real and imaginary parts of the former are no longer Si‐like and resemble more those for metals. The maximum of interband density‐of‐states for optical transitions is positioned at 2.1 eV and coincides with the energy of optical transitions from the main irradiative eigenstate. The obtained results are discussed in terms of geometry‐induced doping changes in interband density of states.
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