2023 IEEE XVI International Scientific and Technical Conference Actual Problems of Electronic Instrument Engineering (APEIE) 2023
DOI: 10.1109/apeie59731.2023.10347838
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Geometric Parameterized Macromodel of Uniaxial Capacitance Accelerometer Based on Modal Superposition

Aleksandr V. Gridchin,
Aleksei N. Koleda,
Evgenii S. Barbin
et al.
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