Generic integration tools for reconfigurable laser micromachining systems

Penchev, Pavel; Dimov, Stefan Simeonov; Bhaduri, Debajyoti; Soo, Sein Leung

doi:10.1016/j.jmsy.2015.10.006

Cited by 16 publications

(10 citation statements)

References 26 publications

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“…5) Repositioning of the workpiece holding device at 180°e mploying one of the rotary stages and thus to gain access to the opposite side of the waveguide and then repetition of Steps 3) and 4). [23]. Furthermore, through careful optimization of the laser processing parameters, Step 7) could be eliminated from the process chain due to the very good repeatability of the laser micromachining operations.…”

Section: Fabrication Detailsmentioning

confidence: 99%

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$W$ -Band Waveguide Filters Fabricated by Laser Micromachining and 3-D Printing

Shang

Penchev

Guo

et al. 2016

IEEE Trans. Microwave Theory Techn.

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119

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This paper presents two W-band waveguide bandpass filters, one fabricated using laser micromachining and the other 3-D printing. Both filters are based on coupled resonators and are designed to have a Chebyshev response. The first filter is for laser micromachining and it is designed to have a compact structure allowing the whole filter to be made from a single metal workpiece. This eliminates the need to split the filter into several layers and therefore yields an enhanced performance in terms of low insertion loss and good durability. The second filter is produced from polymer resin using a stereolithography 3-D printing technique and the whole filter is plated with copper. To facilitate the plating process, the waveguide filter consists of slots on both the broadside and narrow side walls. Such slots also reduce the weight of the filter while still retaining the filter's performance in terms of insertion loss. Both filters are fabricated and tested and have good agreement between measurements and simulations.

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Section: Fabrication Detailsmentioning

confidence: 99%

“…Furthermore, through careful optimization of the laser processing parameters, Step 7) could be eliminated from the process chain due to the very good repeatability of the laser micromachining operations. Further details of the process are given in [23].…”

Section: Fabrication Detailsmentioning

confidence: 99%

$W$ -Band Waveguide Filters Fabricated by Laser Micromachining and 3-D Printing

Shang

Penchev

Guo

et al. 2016

IEEE Trans. Microwave Theory Techn.

Self Cite

119

View full text Add to dashboard Cite

show abstract

“…In addition, generic integration tools, i.e. a modular workpiece holding device, an automated work-piece setting up routine and an automated strategy for multi-axis processing employing rotary stages, were proposed for improving the system-level performance of laser micromachining systems [38].…”

Section: -mentioning

confidence: 99%

Two-Side Laser Processing Method for Producing High Aspect Ratio Microholes

Nasrollahi

Penchev

Dimov

et al. 2017

Journal of Micro and Nano-Manufacturing

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Laser microprocessing is a very attractive option for a growing number of industrial applications due to its intrinsic characteristics, such as high flexibility and process control and also capabilities for noncontact processing of a wide range of materials. However, there are some constrains that limit the applications of this technology, i.e., taper angles on sidewalls, edge quality, geometrical accuracy, and achievable aspect ratios of produced structures. To address these process limitations, a new method for two-side laser processing is proposed in this research. The method is described with a special focus on key enabling technologies for achieving high accuracy and repeatability in two-side laser drilling. The pilot implementation of the proposed processing configuration and technologies is discussed together with an in situ, on-machine inspection procedure to verify the achievable positional and geometrical accuracy. It is demonstrated that alignment accuracy better than 10 μm is achievable using this pilot two-side laser processing platform. In addition, the morphology of holes with circular and square cross sections produced with one-side laser drilling and the proposed method was compared in regard to achievable aspect ratios and holes' dimensional and geometrical accuracy and thus to make conclusions about its capabilities.

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“…Step (5). This step requires repositioning of the workpiece which involves rotations of the stage, and a well-established process provides a precise repositioning, with an evaluated accuracy and repeatability better than 10 µm [44]. Additionally, Step (7) can be eliminated from the process chain through extensive process development, e.g.…”

Section: Laser Micromachining Processmentioning

confidence: 99%

Submillimeter‐wave waveguide filters fabricated by SU‐8 process and laser micromachining

Shang

Yang

Glynn

et al. 2017

IET Microwaves, Antennas & Propagation

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For terahertz systems, rectangular waveguide is an ideal low loss medium for interconnectivity and the construction of passive circuits. A drawback when manufacturing waveguides at submillimeter wavelengths is the demanding tolerances due to small dimensions. For example a WR-3 waveguide (operating between 220 and 325 GHz) has a cross-sectional dimension of just 864 by 432 µm, and higher frequency waveguides get proportionally smaller. An additional challenge is that if using waveguide for passive circuits such as filters, there are additional structures inside the waveguide which are significantly smaller than the waveguide itself. Traditionally, computer numerical control (CNC) milling has been used for waveguides, however at terahertz frequencies this is difficult to utilise. In this paper emerging technologies for terahertz waveguides are compared with conventional CNC solutions. The technologies include the photolithography based polymer etching of waveguides using SU-8 photoresist, and the laser machining of metal. Both have shown promise, and good quality terahertz passive components have been fabricated and measured.

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Generic integration tools for reconfigurable laser micromachining systems

Cited by 16 publications

References 26 publications

$W$ -Band Waveguide Filters Fabricated by Laser Micromachining and 3-D Printing

$W$ -Band Waveguide Filters Fabricated by Laser Micromachining and 3-D Printing

Two-Side Laser Processing Method for Producing High Aspect Ratio Microholes

Submillimeter‐wave waveguide filters fabricated by SU‐8 process and laser micromachining

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