2004
DOI: 10.1002/ctpp.200410069
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Generation of Thin Surface Plasma Layers for Atmospheric‐Pressure Surface Treatments

Abstract: Thin layers of atmospheric-pressure non-equilibrium plasma can be generated by pulse surface corona discharges and surface barrier discharges developing on the treated surfaces or brought into a close contact with the treated surfaces. Plasma sources based on these discharge types have the potential of meeting the basic on-line production requirements in the industry and can be useful for a wide range of surface treatments and deposition processes including continuous treatment of textiles. Comparing with atmo… Show more

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Cited by 42 publications
(24 citation statements)
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“…Volume DBD generates plasma that is non-homogeneous in most cases. The so-called Diffuse Coplanar Surface Barrier Discharge (DCSBD) was developed to address drawbacks of the volume DBD design [19][20][21]. The plasma of DCSBD discharge is generated in a sub-millimeter thin layer above the dielectric plate.…”
Section: Introductionmentioning
confidence: 99%
“…Volume DBD generates plasma that is non-homogeneous in most cases. The so-called Diffuse Coplanar Surface Barrier Discharge (DCSBD) was developed to address drawbacks of the volume DBD design [19][20][21]. The plasma of DCSBD discharge is generated in a sub-millimeter thin layer above the dielectric plate.…”
Section: Introductionmentioning
confidence: 99%
“…The advantage of the microplasmas is that they produce high densities of chemically active species at relatively low energy consumption without any vacuum equipment requirements. The atmospheric microplasmas can be generated by various types of electric discharges, including hollow cathode and capillary plasma electrode discharges [1][2][3][4][5], discharges in porous ceramics and capillary honeycombs [6][7][8][9][10] or dielectric barrier and coplanar discharges [11][12][13].…”
Section: Introductionmentioning
confidence: 99%
“…The thickness of the ceramic layer between the plasma and electrodes was 0.4 mm. Sinusoidal high frequency highvoltage ~10-20 kHz, up to 15 kV peak to peak, was applied between the electrodes [17]. …”
Section: Sl Sgmentioning
confidence: 99%