Abstract:We have developed indirectly heated hollow cathode electrodes and a cascade arc discharge apparatus with different channel diameters to realize plasma windows (PWs) as virtual vacuum interfaces. A compact arc discharge source with a channel diameter of 3 mm is fabricated to realize windowless vacuum–atmosphere separation. An atmospheric high-density Ar thermal plasma is generated, and a PW that produces 100 kPa and 81 Pa separation is demonstrated. An 8 mm channel diameter arc device is also constructed for ap… Show more
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