Generation of near-field hexagonal array illumination with a phase grating

Peng, Xi; Zhou, Changhe; Dai, Enwen; Liu, Liren

doi:10.1364/ol.27.000228

Cited by 38 publications

(14 citation statements)

References 10 publications

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“…Furthermore, fused silica is of high optical quality. Gratings made of fused silica are very useful in highprecision optics field [21][22][23][24] . In this section, we present several experiments for fabrication of fused silica gratings.…”

Section: Resultsmentioning

confidence: 99%

Etching analysis of inductively coupled plasma technology for fabrication of micro-optical elements

Wang

Zhou

et al. 2005

SPIE Proceedings

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Inductively coupled plasma (ICP) technology is a new advanced version of dry-etching technology compared with the widely used method of Reactive Ion Etching (RIE). Extensive experiments have been done successfully and the fabrication results of microoptical elements have proved that the new ICP technology is very effective in dry etching field. Plasma processing of the ICP technology is complicated due to the mixed reactions among discharge physics, chemistry and surface chemistry. Existing models concentrate only on part of the whole problem, for example, on plasma physics, or on chemistry reactions. Despite the efforts to understand and model the etching process, simulation of the surface phenomena with accurate and general model coefficients is still lacking. Need for a simulation is even greater when high-density plasma methods such as inductively coupled plasma (ICP) technology are used due to strong polymer deposition effects. In the paper we analyze the physical reactions and chemical reactions that may occur in the chamber in detail, and a surface dynamic model is used to explain the complex reactions occurring in the reaction chamber. At last, we present an experiment that demonstrates the applicability of the surface dynamic model theory very well. The surface dynamic model of the ICP technology presented in this paper provides us a theory basis so that we can take effective measures to control the etching process of ICP technology and to improve the etching quality of microoptical elements greatly.

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Section: Resultsmentioning

confidence: 99%

Etching analysis of inductively coupled plasma technology for fabrication of micro-optical elements

Wang

Zhou

et al. 2005

SPIE Proceedings

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“…A hexagonal array (HA) not only is a nature-preferred pattern but also is widely used in optoelectronic materials and devices. We propose HA Talbot array illumination based on a binary phase grating 12 . The optical setup of HA Talbot array illumination is shown in Fig.…”

Section: Hexagonal Talbot Array Illuminationmentioning

confidence: 99%

Four novel microoptics gratings made in the Information Optics Lab in Shanghai Institute of Optics and Fine Mechanics

Zhou

2004

SPIE Proceedings

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“…While massively famous for their application as a pattern‐inducing layer in fabrication of periodic nanostructures via the so‐called colloidal lithography, polystyrene (PS) nanospheres are extremely under‐appreciated when it comes to their own optical properties and photon management capabilities as a stand‐alone structure. Due to the hexagonal arrangement of close‐packed nanosphere assemblies, PS nanospheres can form a hexagonal diffraction grating, which is favorable in integrated optics since they occupy the least space compared to any other periodic arrangement . Recently it was demonstrated that PS nanospheres can enhance light absorption in silicon solar cells through light softening, but to the best of our knowledge, their photon management potential for in situ tunable optical diffusion has never been explored to date.…”

Section: Introductionmentioning

confidence: 99%

Stretchable Hexagonal Diffraction Gratings as Optical Diffusers for In Situ Tunable Broadband Photon Management

Mahpeykar

Xiong

Wei

et al. 2016

Advanced Optical Materials

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A stretchable transmissive hexagonal diffraction grating, which has the potential to act as an optical diffuser, is demonstrated. Leveraging the simplicity of the self‐assembly fabrication process, the photon manipulation capability of polystyrene nanosphere arrays, and elastomeric properties of polydimethylsiloxane, the proposed device is capable of reproducible in situ tuning of both diffraction efficiency and spectral range. While being able to achieve maximum diffraction efficiencies of about 80%, the device displays highly efficient and broadband light diffusion fairly independent of incident light polarization and angle of incidence. Due to its efficient and tunable diffraction capabilities, one potential application of the reported device can be broadband photon management in solar cells and photodetectors by significant increase of the light path length inside the light‐absorbing thin films of these devices. As a proof of concept, the proposed optical diffuser is utilized for light absorption enhancement in colloidal quantum dot semiconductor thin films. The demonstrated devices enable integration of cheap and widely used materials with simple cost‐effective fabrication for photon management in optics, photonics, and optoelectronics.

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Generation of near-field hexagonal array illumination with a phase grating

Cited by 38 publications

References 10 publications

Etching analysis of inductively coupled plasma technology for fabrication of micro-optical elements

Etching analysis of inductively coupled plasma technology for fabrication of micro-optical elements

Four novel microoptics gratings made in the Information Optics Lab in Shanghai Institute of Optics and Fine Mechanics

Stretchable Hexagonal Diffraction Gratings as Optical Diffusers for In Situ Tunable Broadband Photon Management

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