2017
DOI: 10.7567/jjap.56.126201
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Generation of microwave-excited atmospheric-pressure line plasma and its application

Abstract: A new 2.45 GHz microwave-excited atmospheric-pressure line plasma system was developed. An atmospheric-pressure helium (He) line plasma with a length of ∼350 mm and a width of ∼6 mm was generated in air at a microwave power of 1100 W. The length of the He line plasma was varied in the range of ∼120–350 mm by changing the width of the waveguide in the microwave tube and the position of the short plunger. When a Si wafer was irradiated with the He line plasma for 10 s, the surface of the Si wafer became superhyd… Show more

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Cited by 3 publications
(1 citation statement)
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“…OH, in particular, has extremely high oxidizing power and is widely used for the treatment of solid surfaces and air purification. OH is generated from vacuum UV (VUV) light, 1) plasma systems, [2][3][4][5][6][7][8] and photocatalysts. [9][10][11][12] Therefore, a method of monitoring OH has been desired in order to control the amount of OH generated from such processes.…”
Section: Introductionmentioning
confidence: 99%
“…OH, in particular, has extremely high oxidizing power and is widely used for the treatment of solid surfaces and air purification. OH is generated from vacuum UV (VUV) light, 1) plasma systems, [2][3][4][5][6][7][8] and photocatalysts. [9][10][11][12] Therefore, a method of monitoring OH has been desired in order to control the amount of OH generated from such processes.…”
Section: Introductionmentioning
confidence: 99%