SHINKU
 1994
DOI: 10.3131/jvsj.37.732
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Generation of Extremely High Vacuum with a New Sputter Ion Pump.

Hiroyuki Kinpara1,
Kazutoshi Hirasawa2,
Takao Kotani3
et al.

Abstract: We have developed a sputter ion pump (SIP) to obtain a lower ultimate pressure.

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