“…Unlike the polymorphs with high manufacturing cost, i.e., 4H-SiC and 6H-SiC, cubic silicon carbide (3C-SiC) can be easily grown on a Si substrate with high quality and low cost. , Therefore, 3C-SiC has been widely studied for its sensing effects, such as the piezoresistive effect, , thermoresistive effect, lateral photovoltaic effect, and vertical photovoltaic effect . Based on these sensing effects, different types of sensors have been developed, including mechanical sensor, thermal sensor, photodetector, position detector, , and accelerometer …”