2007
DOI: 10.1002/ppap.200700043
|View full text |Cite
|
Sign up to set email alerts
|

Ge/Si Quantum Dot Formation From Non‐Uniform Cluster Fluxes

Abstract: The controlled growth of ultra‐small Ge/Si quantum dot (QD) nuclei (≈1 nm) suitable for the synthesis of uniform nanopatterns with high surface coverage, is simulated using atom‐only and size non‐uniform cluster fluxes. It is found that seed nuclei of more uniform sizes are formed when clusters of non‐uniform size are deposited. This counter‐intuitive result is explained via adatom‐nanocluster interactions on Si(100) surfaces. Our results are supported by experimental data on the geometric characteristics of Q… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
2
2
1

Citation Types

0
8
0

Year Published

2007
2007
2020
2020

Publication Types

Select...
6
1

Relationship

1
6

Authors

Journals

citations
Cited by 14 publications
(8 citation statements)
references
References 56 publications
(67 reference statements)
0
8
0
Order By: Relevance
“…There are numerous and sufficiently experienced fabrication methods [6]. Thanks to such methods, quantum dots with different geometrical confinements can be generated, and such systems provide important experiences both experimentally and theoretically [7–10]. In this manner, there are a great deal of confinement examples that are considered theoretically by researchers [11–14].…”
Section: Introductionmentioning
confidence: 99%
“…There are numerous and sufficiently experienced fabrication methods [6]. Thanks to such methods, quantum dots with different geometrical confinements can be generated, and such systems provide important experiences both experimentally and theoretically [7–10]. In this manner, there are a great deal of confinement examples that are considered theoretically by researchers [11–14].…”
Section: Introductionmentioning
confidence: 99%
“…This is due to the faster adatom diffusion rates. One way to sharpen the size distribution of a QD pattern is to shorten t d and instead include clusters in the influx [41]; if this is the case then a robust method for cluster composition, size and relative density in the influx is required. One particular cluster source suitable for this purpose is a plasma discharge [41], which, as shown in previous papers [41,42], can lead to highly size-uniform QDN/QD patterns.…”
Section: Plasma/ion-related Effects During Nanoassemblymentioning
confidence: 99%
“…Owing to the many unique properties of reactive plasmas,20–26 carbon‐based nanostructures,27–34 such as carbon nanotubes (CNTs) and carbon nanofibers (CNFs) can be grown via plasma enhanced chemical deposition (PECVD) in large arrays and feature a greater degree of vertical alignment15, 16, 35 compared to nanostructures synthesized in neutral gas‐based thermal processes, such as chemical vapor deposition (CVD). Controlled PECVD synthesis takes place in the plasma sheath.…”
Section: Introductionmentioning
confidence: 99%