GD amorphous silicon obtained from trichlorsilane

Hydrogenated Amorphous silicon films (a-Si:H) were prepared by mercury sensitized photo-CVD using SiH4 and SiH2Cl2 gas mixture. The effects of chlorine (Cl) on the electrical, optical and structural properties of the a-Si:H films were investigated. It was found that a small addition of SiH2Cl2 to the deposition system increases the photo-sensitivity, decreases the defect density, and reduces the light induced degradation of a-Si:H films. At a large addition of SiH2Cl2, however, the CI incorporation into the films was observed, resulting in the deterioration of the film properties. The electrical and optical properties were successfully improved by the H2 dilution when the films were deposited with a large addition of SiH2Cl2.

show abstract

scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.

Contact Info

hi@scite.ai

10624 S. Eastern Ave., Ste. A-614

Henderson, NV 89052, USA

Blog Terms and Conditions API Terms Privacy Policy Contact Cookie Preferences Do Not Sell or Share My Personal Information

Made with 💙 for researchers

Part of the Research Solutions Family.

GD amorphous silicon obtained from trichlorsilane

Cited by 2 publications

References 5 publications

Photovoltaic characterization of amorphous hydrogenated and chlorinated silicon films

Photovoltaic characterization of amorphous hydrogenated and chlorinated silicon films

Improvement of film Quality of A-Si:H Deposited by Photo-CVD using SiH₂Cl₂

Contact Info

Product

Resources

About

GD amorphous silicon obtained from trichlorsilane

Cited by 2 publications

References 5 publications

Photovoltaic characterization of amorphous hydrogenated and chlorinated silicon films

Photovoltaic characterization of amorphous hydrogenated and chlorinated silicon films

Improvement of film Quality of A-Si:H Deposited by Photo-CVD using SiH2Cl2

Contact Info

Product

Resources

About

Improvement of film Quality of A-Si:H Deposited by Photo-CVD using SiH₂Cl₂