1981
DOI: 10.1116/1.571111
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Gauge calibration system based on piston manometer

Abstract: A system for vacuum gauge calibration using the comparison technique

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“…In conventional instruments the pressure has to balance the piston weight, whereby the lowest generated pressure is limited to just a few kilopascals. A delicate laboratory device for vacuum applications was built several years ago [4]. It offers excellent resolution (2 10 -6 Pa), but its relative uncertainty (10 -2 or 8 10 -3 depending on range) is far too great to meet modern demands.…”
Section: Introductionmentioning
confidence: 99%
“…In conventional instruments the pressure has to balance the piston weight, whereby the lowest generated pressure is limited to just a few kilopascals. A delicate laboratory device for vacuum applications was built several years ago [4]. It offers excellent resolution (2 10 -6 Pa), but its relative uncertainty (10 -2 or 8 10 -3 depending on range) is far too great to meet modern demands.…”
Section: Introductionmentioning
confidence: 99%