Gas thermal conductivity measurement based on the three-omega method

Gauthier, Sebastian; Combette, Philippe; Giani, Alain

doi:10.1109/icsens.2012.6411023

Cited by 2 publications

(1 citation statement)

References 14 publications

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“…One function of the bridge is thus to keep the sensing element away from the silicon support prongs and thus reduce their possible influence on the measurements. Moreover, such a bridge structure with a width of 10 µm was previously shown to be very robust even with greater lengths [4]. This design should thus provide a satisfactory structural resistance to flow dynamic pressure that is essential for high Re flow applications.…”

Section: A Probe Design and Materialsmentioning

confidence: 99%

Micro thermal anemometer (µTA) for turbulence measurement: development, fabrication and characterization

Baradel

Léon

Giani

et al. 2021

2021 Symposium on Design, Test, Integration &Amp; Packaging of MEMS and MOEMS (DTIP)

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The present work provides details on the fabrication and the characterization of a micro thermal anemometer for measuring velocity fluctuations in turbulent flows. This device is based on a freestanding thin platinum wire of 60 µm × 0.2 µm × 1.5 µm acting as sensing element, placed in the middle of a 900 µm length bridge and supported by a silicon structure. A discussion is provided on the designing steps and the manufacturing process relying on micro fabrication techniques. A series of flow velocity measurements was conducted in a turbulent boundary layer to evaluate the response of this sensor. The results are discussed and compared with conventional hot wire anemometry measurements and semi-empirical models to highlight the relevance of this new sensor for turbulence studies.

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Section: A Probe Design and Materialsmentioning

confidence: 99%