2022 IEEE Sensors 2022
DOI: 10.1109/sensors52175.2022.9967080
|View full text |Cite
|
Sign up to set email alerts
|

Gas Sensor Based on Silicon Nitride Integrated Long Period Grating

Abstract: HAL is a multi-disciplinary open access archive for the deposit and dissemination of scientific research documents, whether they are published or not. The documents may come from teaching and research institutions in France or abroad, or from public or private research centers. L'archive ouverte pluridisciplinaire HAL, est destinée au dépôt et à la diffusion de documents scientifiques de niveau recherche, publiés ou non, émanant des établissements d'enseignement et de recherche français ou étrangers, des labor… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
2
1

Citation Types

0
3
0

Year Published

2023
2023
2024
2024

Publication Types

Select...
2

Relationship

0
2

Authors

Journals

citations
Cited by 2 publications
(3 citation statements)
references
References 16 publications
0
3
0
Order By: Relevance
“…In addition, Long Period Fiber Grating (LFPG) sensors [14,15], Fabry-Pérot Interferometer (FPI) sensors [16,17], Michelson Interferometer (MI) sensors [18,19], Mach-Zehnder Interferometer (MZI) sensors [20], and others are also mature technologies.…”
Section: The Basic Principle Of Optical Fiber Sensorsmentioning
confidence: 99%
See 1 more Smart Citation
“…In addition, Long Period Fiber Grating (LFPG) sensors [14,15], Fabry-Pérot Interferometer (FPI) sensors [16,17], Michelson Interferometer (MI) sensors [18,19], Mach-Zehnder Interferometer (MZI) sensors [20], and others are also mature technologies.…”
Section: The Basic Principle Of Optical Fiber Sensorsmentioning
confidence: 99%
“…Second, through the clever design of the coating layer, the optical fiber sensor can simultaneously detect a variety of target substances, especially to realize the detection of physical quantities or substances that are not sensitive to the optical fiber [23]. The fluorescent In addition, Long Period Fiber Grating (LFPG) sensors [14,15], Fabry-Pérot Interferometer (FPI) sensors [16,17], Michelson Interferometer (MI) sensors [18,19], Mach-Zehnder Interferometer (MZI) sensors [20], and others are also mature technologies.…”
Section: The Basic Principle Of Optical Fiber Sensorsmentioning
confidence: 99%
“…Moreover, silicon photonics is gaining attention over silicon electronics in terms of speed, power, and bandwidth, specifically relating to the gas sensing applications as studied in [ 44 ], which investigates different techniques and design approaches, such as the PhC-based gas sensor, dual gas sensors, and trace gas sensors. Apart from these, using the long period gratings (LPG) coupled to a single mode, propagation in the silicon layer is explored in [ 45 ] for the efficient detection of the different concentrations of CO 2 gas using a functional polymer layer of PHMB. Similarly, on-chip optical sensors have vast applications in the field of gas-sensing applications; a detailed study on different perspectives of this topic is investigated in [ 46 ], using group-IV materials for the purpose.…”
Section: Introductionmentioning
confidence: 99%