Gas-sensing properties of PdO-modified SnO2–Fe2O3 double-layer thin-film sensor prepared by PECVD technique

Semiconductor Gas Sensors: Dry Synthesis and Application

“…[152] Double-layer thin films of SnO 2 and Fe 2 O 3 have also been manufactured with PECVD and subsequently doped with Pd in the wet phase. [144] 6. Applications of Semiconductor Gas Sensors Prepared by Dry Synthesis…”

Effect of Fe doping on the gas sensing properties of nano-crystalline SnO2 thin films

“…Nano-crystalline materials offer a solution to this problem by having a higher surface to volume ratio of the constituting particles. Nano-crystalline powders, thick and thin films of tin oxide have been synthesized by a number of research groups using various techniques such as spray pyrolysis [2], sol-gel [3], plasma enhanced chemical vapour deposition (PECVD) [4] and magnetron sputtering techniques [5,6]. However, among all these, sol-gel or solution based techniques offer a very high extent of flexibility with simplicity for tailoring crystallite size and modifying the material properties.…”

“…Further, SnO 2 /Fe 2 O 3 nano-composite powders with a grain size ranging from 3 to 30 nm were prepared by wet chemical synthesis and sensing of H 2 S gas has been reported [8]. On the other hand, the gas sensing properties of Fe-doped SnO 2 thin films have although been studied by a few groups [2,4]; but the sensing characteristics of sol-gel derived Fe-doped SnO 2 films have never been reported.…”

Analytical Investigations of Concentration Dependences of Gas Sensors Sensitivity

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