2020
DOI: 10.3762/bjnano.11.85
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Gas-sensing features of nanostructured tellurium thin films

Abstract: Nanocrystalline and amorphous nanostructured tellurium (Te) thin films were grown and their gas-sensing properties were investigated at different operating temperatures with respect to scanning electron microscopy and X-ray diffraction analyses. It was shown that both types of films interacted with nitrogen dioxide, which resulted in a decrease of electrical conductivity. The gas sensitivity, as well as the response and recovery times, differed between these two nanostructured films. It is worth mentio… Show more

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Cited by 6 publications
(1 citation statement)
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“…The main methods of the fabrication of gas sensitive Te based films implies the thermal vacuum evaporation of either pure polycrystalline Te or its alloys, pulsed laser deposition [31], the rf sputtering [32] or direct vapor phase process [33] in an argon atmosphere. The films usually were grown onto hard substrates of glass Pyrex, quartz, sintered or porous alumina [34], Si / SiO 2 wafers and others.…”
Section: Introductionmentioning
confidence: 99%
“…The main methods of the fabrication of gas sensitive Te based films implies the thermal vacuum evaporation of either pure polycrystalline Te or its alloys, pulsed laser deposition [31], the rf sputtering [32] or direct vapor phase process [33] in an argon atmosphere. The films usually were grown onto hard substrates of glass Pyrex, quartz, sintered or porous alumina [34], Si / SiO 2 wafers and others.…”
Section: Introductionmentioning
confidence: 99%