Gas pressure measurement using micro-corona-discharging effect in surface acoustic wave resonators

Hu, Baofa; Li, Zhiwei; Wan, Yuanjie; Li, Mingpo; San, Haisheng

doi:10.1016/j.rinp.2021.104221

Cited by 4 publications

(3 citation statements)

References 25 publications

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“…Elastic Compliance Constants (sij): These constants describe how a material deforms in response to applied stress. There are six independent constants: s11, s12, s13, s33, s44, and s66 [29].…”

Section: Elastic Constant Piezoelectric Constant and Dielectric Constantmentioning

confidence: 99%

A brief investigation of one-port SAW resonator for the application in communication systems

Turuk,

Behera

2024

Eng. Res. Express

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In recent years, with the rapid growth of communication technology and the necessity for Radiofrequency (RF) front-end devices, the one-port Surface Acoustic Wave Resonator (SAWR) turns out to be a significant component in the design of a SAW device. Hence, the present study concentrates on and around one-port multi-layer SAW resonators with their applications in communication systems. A comparative and critical analysis of various parameters is explored including temperature coefficient of frequency (TCF), Quality factor (Q-factor), phase velocity, impedance ratio, bandwidth, sensitivity, metallization ratio, etc. to discuss the advantage and disadvantages of conventional one-port multi-layer SAW resonator. Through the analysis, future research trends as well as the applications of one port multi-layer SAW resonator are also discussed. The study also explores that the one port multi-layer SAW resonator finds employability in various applications like multimedia and mobile communication, medical field sensing technology, broadband signal processing at high frequencies, etc. Thus, significant, and efficient parameters of the resonator can be easily identified through comparative and critical analysis. The outcome of this study will help the researchers to enhance their work in this specific field in the future.

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Section: Elastic Constant Piezoelectric Constant and Dielectric Constantmentioning

confidence: 99%

A brief investigation of one-port SAW resonator for the application in communication systems

Turuk,

Behera

2024

Eng. Res. Express

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“…An alternative atomizers platform has been developed that employs the use of surface acoustic wave (SAW). SAW is a nanometer-order amplitude sound wave that propagates along the surface of a piezoelectric substrate 19 , 20 . Compared with conventional ultrasonic atomization (< 1 MHz), SAW atomization is driven at a higher frequency (> 10 MHz) and can generate a large amount of aerosol in a range of 1–10 μm.…”

Section: Introductionmentioning

confidence: 99%

Experimental research on surface acoustic wave microfluidic atomization for drug delivery

Huang

et al. 2022

Sci Rep

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This paper demonstrates that surface acoustic wave (SAW) atomization can produce suitable aerosol concentration and size distribution for efficient inhaled lung drug delivery and is a potential atomization device for asthma treatment. Using the SAW device, we present comprehensive experimental results exploring the complexity of the acoustic atomization process and the influence of input power, device frequency, and liquid flow rate on aerosol size distribution. It is hoped that these studies will explain the mechanism of SAW atomization aerosol generation and how they can be controlled. The insights from the high-speed flow visualization studies reveal that it is possible by setting the input power above 4.17 W, thus allowing atomization to occur from a relatively thin film, forming dense, monodisperse aerosols. Moreover, we found that the aerosol droplet size can be effectively changed by adjusting the input power and liquid flow rate to change the film conditions. In this work, we proposed a method to realize drug atomization by a microfluidic channel. A SU-8 flow channel was prepared on the surface of a piezoelectric substrate by photolithography technology. Combined with the silicon dioxide coating process and PDMS process closed microfluidic channel was prepared, and continuous drug atomization was provided to improve the deposition efficiency of drug atomization by microfluidic.

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“…Pressure sensors, as popular sensors in modern industrial society, are widely applied in industrial automation processes, aerospace and astronautical engineering, the petrochemical industry, deep-sea exploration, etc. [ 1 , 2 , 3 , 4 , 5 ]. Pressure measurement systems use different sensing principles, for example, piezoresistive, piezoelectric, and capacitive principles.…”

Section: Introductionmentioning

confidence: 99%

Wafer-Level Self-Packaging Design and Fabrication of MEMS Capacitive Pressure Sensors

Wan

Huang

et al. 2022

Micromachines

Self Cite

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This paper reports a MEMS capacitive pressure sensor (CPS) based on the operating principle of touch mode. The CPS was designed and fabricated using wafer-level self-packaged MEMS processes. The variable capacitance sensing structure was vacuum-sealed in a cavity using the Si–glass anodic bonding technique, and the embedded Al feedthrough lines at the Si–glass interface were used to realize the electrical connections between the parallel plate electrodes and the electrode pads through Al vias. The optimal design of the CPS structure was performed to trade-off the performance and reliability using finite element simulation. The CPS based on a circular-shaped diaphragm with a radius of 2000 µm and a thickness of 40 µm exhibits good comprehensive performance with a sensitivity of 52.3 pF/MPa and a nonlinearity of 2.7%FS in the pressure range of 100–500 kPa when the ambient temperature is less than 50 °C.

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Gas pressure measurement using micro-corona-discharging effect in surface acoustic wave resonators

Cited by 4 publications

References 25 publications

A brief investigation of one-port SAW resonator for the application in communication systems

A brief investigation of one-port SAW resonator for the application in communication systems

Experimental research on surface acoustic wave microfluidic atomization for drug delivery

Wafer-Level Self-Packaging Design and Fabrication of MEMS Capacitive Pressure Sensors

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