1999
DOI: 10.1021/ic981365b
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Gas Phase Photoproduction of Diatomic Metal Nitrides During Metal Nitride Laser Chemical Vapor Deposition

Abstract: Photolysis of M(NEt2)4 in the gas phase produces diatomic MN molecules (M = Ti, Zr, Hf). TiN and ZrN molecules were identified in the gas phase under CVD conditions by emission spectroscopy and time-of-flight mass spectroscopy. Nanostructured deposits of TiN were formed on quartz substrates by irradiating Ti(NEt2)4 gas at 355 nm. These studies demonstrate the gas phase formation of diatomic molecules having the same stoichiometry as that of the desired solid-phase deposit.

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Cited by 19 publications
(22 citation statements)
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References 23 publications
(31 reference statements)
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“…Rabi (19) The evolution of the density matrix under such a driving field is illustrated in Figure 1b. As an approximation, a stepwise change in occupations of two interacting orbitals is adopted.…”
Section: Journal Of Chemical Theory and Computationmentioning
confidence: 99%
See 1 more Smart Citation
“…Rabi (19) The evolution of the density matrix under such a driving field is illustrated in Figure 1b. As an approximation, a stepwise change in occupations of two interacting orbitals is adopted.…”
Section: Journal Of Chemical Theory and Computationmentioning
confidence: 99%
“…Luminescence spectroscopy and photoionization time-of-flight (PI-TOF) mass spectrometry have been used to study the photofragmentation of gas-phase metal-containing molecules. The corresponding computational analysis of these processes, however, is complicated and challenging. The laser field can induce both excitation and de-excitation processes between the electronic states of the target molecule.…”
Section: Introductionmentioning
confidence: 99%
“…Experimentally, we and others have demonstrated that photoionization time-of-flight mass spectrometry (PI–TOF–MS) is a powerful tool for investigating the photofragmentation mechanisms of metal–organic precursors. Theoretical and computational challenges of exploring the combined electronic and nuclear dynamics in the presence of laser field are due to the breakdown of the Born–Oppenheimer approximation . For nonequilibrium states, the dynamics of the nuclei are coupled to the dynamics of the electronic state, going beyond the Born–Oppenheimer approximation, while electronic state dynamics is perturbed by electric field of laser. The time evolution of coupled electronic and nuclear degrees of freedom can be explored by propagating the elements of the density matrix through the Liouville–von Neumann equation of motion. Both trajectory surface hopping methods , and self-consistent potential methods , have been used to treat the coupling.…”
Section: Introductionmentioning
confidence: 99%
“…There have been many studies on the photofragmentation pathways of gas-phase molecular compounds, metal–organic complexes, and clusters. , Recently, our group reported the unimolecular gas-phase photodissociation mechanisms of lanthanide tris­(η 5 -cyclopentadienyl) complexes, Ln­(Cp) 3 , and lanthanide tris­(tetramethylcyclopentadienyl) complexes, Ln­(TMCp) 3 , through both experimental photoionization time-of-flight mass spectrometry (PI-TOF-MS) and theoretical atomistic simulation of the fragmentation dynamics . It was hypothesized that two types of reaction pathways dominate in the photofragmentation of both Ln­(Cp) 3 and Ln­(TMCp) 3 precursors: intact ligand stripping, leading to the production of bare metal, and ligand cracking within the metal–ligand complex, giving rise to metal carbide and metal hydrocarbide compounds.…”
Section: Introductionmentioning
confidence: 99%