Gas phase kinetic and optical emission spectroscopy studies in plasma-enhanced hot filament catalytic CVD production of carbon nanotubes

Gulas, Michal; Normand, F. Le; Veis, P.

doi:10.1016/j.apsusc.2008.08.065

Cited by 5 publications

(3 citation statements)

References 21 publications

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“…The Institute of Photovoltaic (IPV) realized that initial solar energy conversion efficiency is increased from 7.9% up to 8.8% by applying process control monitored by optical emission spectroscopy (OES) [3]. M. Guláš et al indicated that OES is useful as a main experimental tool to define the concentration of the active gas phase species for carbon nanotube (CNT) growth [4]. A. Prarashar et al had investigated the correlation between pressure, crystallinity and conductivity by using OES during a CVD process [5].…”

Section: Introductionmentioning

confidence: 99%

Characterization of HF-PECVD a-Si:H thin film solar cells by using OES studies

Lien

Chang

Cho

et al. 2011

Journal of Non-Crystalline Solids

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Section: Introductionmentioning

confidence: 99%

Characterization of HF-PECVD a-Si:H thin film solar cells by using OES studies

Lien

Chang

Cho

et al. 2011

Journal of Non-Crystalline Solids

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“…Among these growth techniques, PECVD has become a very promising technology for the direct synthesis of vertically aligned CNTs/CNFs used for field emission devices [32][33][34][35]. A variety of plasma sources, such as microwave discharges (MW) [9,10], hot filament (HF) [11], dc-glow discharges (dc) [12-14, 26, 27], RF capacitively coupled plasmas (CCP) [15,16] and RF inductively coupled plasmas (ICP) [17-24, 30, 31], have been used to generate a plasma of typical feedstock mixtures such as CH 4 or C 2 H 2 mixed with either H 2 or NH 3 . The recent progress in PECVD for CNT/CNF synthesis has been summarized in tables 1 and 2.…”

Section: Introductionmentioning

confidence: 99%

“…Optical emission spectroscopy studies were performed by Gulas et al [11] in a plasma enhanced hot filament CVD system for CNT growth for comparison with kinetic simulations of the plasma. They found that the formation of CN and HCN species significantly changed the density and morphology of the CNTs when NH 3 was diluted into the C 2 H 2 plasma.…”

Section: Introductionmentioning

confidence: 99%

Investigating the plasma chemistry for the synthesis of carbon nanotubes/nanofibres in an inductively coupled plasma enhanced CVD system: the effect of different gas mixtures

Mao¹,

Bogaerts²

2010

J. Phys. D: Appl. Phys.

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To cite this version:M Mao, A Bogaerts. Investigating the plasma chemistry for the synthesis of carbon nanotubes/nanofibres in an inductively coupled plasma enhanced CVD system: the effect of different gas mixtures. Journal of Physics D: Applied Physics, IOP Publishing, 2010, 43 (20) Abstract. A hybrid model, called the Hybrid Plasma Equipment Model (HPEM) was used to study an inductively coupled plasma in gas mixtures of H 2 or NH 3 with CH 4 or C 2 H 2 used for the synthesis of carbon nanotubes or carbon nanofibers (CNTs/CNFs). The plasma properties are discussed for the different gas mixture at low and moderate pressure, and the growth precursors for CNTs/CNFs are analyzed. It is found that C 2 H 2 , C 2 H 4 , and C 2 H 6 are the predominant molecules in CH 4 containing plasmas beside the feedstock gas, and serve as carbon sources for CNT/CNF formation. On the other hand, long chain hydrocarbons are observed in C 2 H 2 containing plasmas. Furthermore, the background gases CH 4 and C 2 H 2 show a different decomposition rate with H 2 or NH 3 addition at moderate pressures.

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Plasma diagnostic and microstructural study of WCN coatings growth by pulsed vacuum arc discharge

Escobar

Ospina

Quintero

et al. 2018

Contributions to Plasma Physics

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In this work, we present a study of the plasma evolution during tungsten carbon nitride (WCN) coatings production using the repetitive pulsed arc technique. For the coatings production, a tungsten carbide (WC) target, and a mixture of argon and nitrogen as the filled gas were used. The study was carried out for discharges generated with one, two, three, and four pulses. The WCN coatings were characterized by X-ray diffraction (XRD) to identify the phases present in this material. The plasma was experimentally studied by optical emission spectroscopy (OES). A correlation was found between the spectral lines behavior and the material composition evolution. As the number of pulses increased, the intensity of the spectral lines also increased, especially in the case of the atomic lines of nitrogen, NI. The results were analysed to obtain information regarding the reactions in the plasma, as well as the electron temperature and density.

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Gas phase kinetic and optical emission spectroscopy studies in plasma-enhanced hot filament catalytic CVD production of carbon nanotubes

Cited by 5 publications

References 21 publications

Characterization of HF-PECVD a-Si:H thin film solar cells by using OES studies

Characterization of HF-PECVD a-Si:H thin film solar cells by using OES studies

Investigating the plasma chemistry for the synthesis of carbon nanotubes/nanofibres in an inductively coupled plasma enhanced CVD system: the effect of different gas mixtures

Plasma diagnostic and microstructural study of WCN coatings growth by pulsed vacuum arc discharge

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