1996
DOI: 10.1021/jp951439u
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Gas Phase Ion−Molecule Reactions in Phosphine/Silane Mixtures

Abstract: Phosphine/silane mixtures have been investigated by ion trap mass spectrometry, and reaction pathways together with rate constants of the main reactions are reported. Mechanisms of ion-molecule reactions have been elucidated by single and multiple isolation steps, and exact mass measurements have been performed by Fourier transform mass spectrometry. The SiH n + (n ) 0-3) ions react with phosphine to give SiPH n + (n ) 1-4) ions. These ions further react and yield SiP 2 H n + (n ) 2-5) and Si 2 PH n + (n ) 3-7… Show more

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Cited by 25 publications
(25 citation statements)
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“…[3][4][5][6] The pressures were read by a Bayard-Alpert ionization gauge and were typically 2 -5ϫ10 Ϫ7 Torr for phosphine and about 5 ϫ10 Ϫ4 Torr for helium. The real pressure in the trap was calculated considering the relative sensitivity of the ion gauge with respect to different gases 8 and a calibration factor for the geometry of the instrument.…”
Section: Methodsmentioning
confidence: 99%
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“…[3][4][5][6] The pressures were read by a Bayard-Alpert ionization gauge and were typically 2 -5ϫ10 Ϫ7 Torr for phosphine and about 5 ϫ10 Ϫ4 Torr for helium. The real pressure in the trap was calculated considering the relative sensitivity of the ion gauge with respect to different gases 8 and a calibration factor for the geometry of the instrument.…”
Section: Methodsmentioning
confidence: 99%
“…The real pressure in the trap was calculated considering the relative sensitivity of the ion gauge with respect to different gases 8 and a calibration factor for the geometry of the instrument. 5 The scan modes for ion/molecule reaction experiments, in which reaction mechanisms and rate constants are determined, have been previ-ously described in detail together with the calculation procedures. [3][4][5][6] In kinetic experiments, isolation of the precursor ions was generally obtained by a superimposition of radio frequency ͑rf͒ and direct current ͑dc͒ voltages.…”
Section: Methodsmentioning
confidence: 99%
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“…The ion molecule reactions that occur in mixtures of SiH 4 and PH 3 have recently been described 115 . As in the aforementioned cases, the main reaction channels for the formation of larger-sized clusters from SiH n C cations (n D 0 3) and PH 3 , and from the reactions of PH x C cations (n D 0 3) with SiH 4 , correspond to the addition of the neutral molecule and dissipation of the excess energy via loss of a hydrogen molecule.…”
mentioning
confidence: 99%