2021
DOI: 10.1039/d1cp00720c
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Gas-phase aluminium acetylacetonate decomposition: revision of the current mechanism by VUV synchrotron radiation

Abstract: Although aluminium acetylacetonate, Al(C5H7O2)3, is a common precursor for chemical vapor deposition (CVD) of aluminium oxide, its gas phase decomposition is not very well investigated. Here, we studied its thermal...

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Cited by 27 publications
(50 citation statements)
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“…The reactor temperature is considered to represent the gas temperature inside the reactor to within 100 C. 18 The pressure and residence time in the reactor have been estimated to be 10-40 mbar and up to 100 μs, respectively. 18,19 The reactor is placed in the source vacuum chamber, where the pressure was $ 5 Â 10 À5 mbar during measurements. The molecular beam exiting the pyrolysis reactor passed through a 2 mm diameter skimmer into the detection chamber, kept at a pressure of 10 À6 mbar during measurements.…”
Section: Methodsmentioning
confidence: 99%
See 1 more Smart Citation
“…The reactor temperature is considered to represent the gas temperature inside the reactor to within 100 C. 18 The pressure and residence time in the reactor have been estimated to be 10-40 mbar and up to 100 μs, respectively. 18,19 The reactor is placed in the source vacuum chamber, where the pressure was $ 5 Â 10 À5 mbar during measurements. The molecular beam exiting the pyrolysis reactor passed through a 2 mm diameter skimmer into the detection chamber, kept at a pressure of 10 À6 mbar during measurements.…”
Section: Methodsmentioning
confidence: 99%
“…The reactor temperature is considered to represent the gas temperature inside the reactor to within 100°C 18 . The pressure and residence time in the reactor have been estimated to be 10–40 mbar and up to 100 μs, respectively 18,19 . The reactor is placed in the source vacuum chamber, where the pressure was ~ 5 × 10 −5 mbar during measurements.…”
Section: Methodsmentioning
confidence: 99%
“…Neither atomic iron, nor other iron-containing intermediates were detected in the gas-phase at temperatures below 900 K. If these species were formed in gas-phase reactions, we expect to be able to detect them based on previous experimental experience. [47] Additionally, previous studies of other investigators by quadrupole mass spectrometry also did not observe their formation at temperatures below 1173 K. [25] It is evident from the findings by Dyagileva et al [42] that the activation energy for the thermolysis of the Fe-Cp bond on a surface is much lower than in the gas-phase. A similar behavior is observed in our study, because a significant amount of Fe is only detected in the gas-phase after heating the reactor Table 1.…”
Section: Pyrolysis Pathways Of Ferrocenementioning
confidence: 93%
“…For the sake of clarity, the reader is referred to our work on the numerical simulation of the microreactor, which is described in detail elsewhere. [47] In brief, to determine the temperature dependence of the Fe(C 5 H 5 ) 2 mole fraction, the procedure proposed by Zhang et al, [106] was followed, where the influence of temperature-dependent signal variations of argon (m/z 40) due to a change in expansion behavior and therefore the sampling efficiency is characterized by the gas expansion coefficient λ(T). This expansion coefficient was determined by recording temperature-dependent mass spectra at a fixed photon energy of 15.8 eV in the 300-1300 K range (Figure S4, Supporting Information).…”
Section: Methodsmentioning
confidence: 99%