Gas diffusion barrier characteristics of Al2O3/alucone films formed using trimethylaluminum, water and ethylene glycol for organic light emitting diode encapsulation

Park, Minwoo; Oh, Seungsik; Kim, Hoonbae; Jung, Donggeun; Choi, Dongwon; Park, Jin‐Seong

doi:10.1016/j.tsf.2013.05.017

Cited by 53 publications

(46 citation statements)

References 31 publications

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“…This was attributed to the fact that the alucone organic layer increases the permeation path for water vapor in the hybrid structure. It also reacts with the water vapor, decreasing the diffusion speed [11,27]. Figure 6 illustrates the water vapor permeation process for different thin film structures.…”

Section: Resultsmentioning

confidence: 99%

“…WVTR measurements were carried out to test the barrier performance of the films through the calcium (Ca) corrosion method. The amount of water vapor permeating through the film was estimated with the following formula [11]:…”

Section: Methodsmentioning

confidence: 99%

“…Recently, this type of thin film encapsulation (TFE) has attracted great attention in order to overcome the air-sensitive issue [8-10]. The inorganic/organic encapsulation method based on ALD and molecular layer deposition (MLD), respectively, has demonstrated better barrier performance and mechanical properties than single inorganic layers [11-13]. On the one hand, the organic layer could potentially decouple any defects and prolong the permeation path, leading to lower WVTR values [14,15].…”

Section: Introductionmentioning

confidence: 99%

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A flexible transparent gas barrier film employing the method of mixing ALD/MLD-grown Al2O3 and alucone layers

et al. 2015

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Atomic layer deposition (ALD) has been widely reported as a novel method for thin film encapsulation (TFE) of organic light-emitting diodes and organic photovoltaic cells. Both organic and inorganic thin films can be deposited by ALD with a variety of precursors. In this work, the performances of Al2O3 thin films and Al2O3/alucone hybrid films have been investigated. The samples with a 50 nm Al2O3 inorganic layer deposited by ALD at a low temperature of 80°C showed higher surface roughness (0.503 ± 0.011 nm), higher water vapor transmission rate (WVTR) values (3.77 × 10−4 g/m2/day), and lower transmittance values (61%) when compared with the Al2O3 (inorganic)/alucone (organic) hybrid structure under same conditions. Furthermore, a bending test upon single Al2O3 layers showed an increased WVTR of 1.59 × 10−3 g/m2/day. However, the film with a 4 nm alucone organic layer inserted into the center displayed improved surface roughness, barrier performance, and transmittance. After the bending test, the hybrid film with 4 nm equally distributed alucone maintained better surface roughness (0.339 ± 0.014 nm) and barrier properties (9.94 × 10−5 g/m2/day). This interesting phenomenon reveals that multilayer thin films consisting of inorganic layers and decentralized alucone organic components have the potential to be useful in TFE applications on flexible optical electronics.

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Section: Resultsmentioning

confidence: 99%

Section: Methodsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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A flexible transparent gas barrier film employing the method of mixing ALD/MLD-grown Al2O3 and alucone layers

et al. 2015

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“…In this solution, moisture barrier layers consist of alternating organic/inorganic thin layers, mostly deposited by vapor‐phase techniques . It is worth mentioning that recently, as alternative approach, alternating organic/inorganic or fully‐inorganic ultra‐thin multilayers (i.e., nanolaminates) have been introduced as moisture permeation barriers, showing promising results in terms of barrier properties …”

Section: Introductionmentioning

confidence: 99%

Ellipsometric Porosimetry and Electrochemical Impedance Spectroscopy Characterization for Moisture Permeation Barrier Layers

Perrotta

García

Creatore

2015

Plasma Processes & Polymers

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In this work the combination of ellipsometric porosimetry (EP) and electrochemical impedance spectroscopy (EIS) is extensively addressed in order to characterize the nanoporosity and further elucidate its influence on the water permeation properties of plasma enhanced-CVD SiO 2 layers. Pores with diameter in the range of 0.27-0.6 nm are studied by adopting a multisolvent/multi-ion approach, with EP and EIS, respectively. This combined study has brought to conclude that open pores larger than 0.42 nm are responsible for WVTR values in the range of 10 À3 -10 À5 gm À2 d À1 , while pores with diameter between 0.42-0.27 nm were found to drive the transition to excellent moisture barrier layers (10Moreover, it is shown that EIS is capable of detecting macro-scale defects, next to nanoporosity, being thus a powerful tool for the analysis of moisture barrier layers.

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“…Additionally, different deposition approaches such as atomic layer deposition (ALD) in combination with molecular layer deposition [10][11][12][13][14], and all PE-CVD developed multilayers have been reported in literature [15][16][17][18]. Coclite et al [19] reported on the deposition of multilayers based on organosilicon chemistry, in which the inorganic barrier layer is deposited by means of PE-CVD and the organic interlayer is deposited by means of initiated-CVD (i-CVD) [20][21][22].…”

Section: Introductionmentioning

confidence: 99%

The impact of the nano-pore filling on the performance of organosilicon-based moisture barriers

et al. 2015

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Gas diffusion barrier characteristics of Al2O3/alucone films formed using trimethylaluminum, water and ethylene glycol for organic light emitting diode encapsulation

Cited by 53 publications

References 31 publications

A flexible transparent gas barrier film employing the method of mixing ALD/MLD-grown Al2O3 and alucone layers

A flexible transparent gas barrier film employing the method of mixing ALD/MLD-grown Al2O3 and alucone layers

Ellipsometric Porosimetry and Electrochemical Impedance Spectroscopy Characterization for Moisture Permeation Barrier Layers

The impact of the nano-pore filling on the performance of organosilicon-based moisture barriers

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