GaN thickness dependence of GaN/AlN superlattices on face-to-face-annealed sputter-deposited AlN templates
Momoko Deura,
Naoya Mokutani,
Yuichi Wada
et al.
Abstract:Recently, deep-ultraviolet (DUV) light-emitting devices have attracted attention for various applications. GaN/AlN superlattices have emerged as a promising alternative for achieving high-efficiency DUV emission. To fabricate superlattices with high crystal quality and abrupt interfaces, we have utilized face-to-face-annealed sputter-deposited AlN template substrates characterized by a flat surface and low dislocation density. Furthermore, radio-frequency plasma-assisted molecular beam epitaxy with in situ ref… Show more
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