2022 IEEE International Reliability Physics Symposium (IRPS) 2022
DOI: 10.1109/irps48227.2022.9764510
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GaN RF HEMT Reliability: Impact of Device Processing on I-V Curve Stability and Current Collapse

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Cited by 2 publications
(1 citation statement)
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“…Low-pressure chemical vapour deposition (LPCVD) approach, used for SiNx passivation of AlGaN/GaN HEMTs, is another surface treatment method to suppress CC. Reliability analysis and impact of passivation and gate foot etching was demonstrated by F. Chiocchetta et al and best stability was observed for LPCVD process [55]. The passivation-prior-to-ohmic process technique [56,57] is made possible by the high-thermal-stability LPCVD-SiNx, and the creation of new surface states on the surface of HEMT is significantly reduced [58][59][60][61].…”
Section: Current Collapse Suppressionmentioning
confidence: 98%
“…Low-pressure chemical vapour deposition (LPCVD) approach, used for SiNx passivation of AlGaN/GaN HEMTs, is another surface treatment method to suppress CC. Reliability analysis and impact of passivation and gate foot etching was demonstrated by F. Chiocchetta et al and best stability was observed for LPCVD process [55]. The passivation-prior-to-ohmic process technique [56,57] is made possible by the high-thermal-stability LPCVD-SiNx, and the creation of new surface states on the surface of HEMT is significantly reduced [58][59][60][61].…”
Section: Current Collapse Suppressionmentioning
confidence: 98%