“…[28] SiO 2 (PE-ALD) [7,24,25] β-Ga 2 O 3 (PE-ALD) [38] Silicon nitride (PE-ALD) [22,23,27,31,37,40] Plasma treatment (PE-ALD) [26] Electron treatment (CVD based) [36,39] GaN (CVD based) [42,44,45,55] InN (CVD based) [41][42][43]45,47,48,53,57,58] InGaN (CVD based) [49,51,54,56] InN nanopillars (CVD based) [46,50,52,55] The oxygen contamination overview provided in this introduction is followed by an experimental examination of some effects related to the surface modification of cathode materials by the generated plasma. In particular, we examine changes that have been observed for aluminum and stainless-steel cathodes.…”