2007
DOI: 10.1109/lpt.2007.905182
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Gallium In-Diffusion for the Fabrication of Lithium Niobate Optical Waveguides

Abstract: Gallium oxide used as a diffusion source for the fabrication of lithium niobate optical waveguides is presented. The optical waveguide properties are investigated and the behavior of the in-diffused gallium is characterized by the secondary ion mass spectroscopy. Single-mode single-polarization optical waveguides with low propagation loss at 632.8 and 1550 nm can be obtained. For reference, the diffusion constant and activation energy of the in-diffused gallium atoms are also obtained.

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Cited by 10 publications
(4 citation statements)
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“…The halfwave voltage and the extinction ratio are measured to be 3.2 V and 21.4 dB, respectively. Note that, as the gallium-diffused waveguides have been shown to support only extraordinary waves [7], the output power of ordinary waves can hardly be detected.…”
Section: Measurement and Resultsmentioning
confidence: 99%
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“…The halfwave voltage and the extinction ratio are measured to be 3.2 V and 21.4 dB, respectively. Note that, as the gallium-diffused waveguides have been shown to support only extraordinary waves [7], the output power of ordinary waves can hardly be detected.…”
Section: Measurement and Resultsmentioning
confidence: 99%
“…However, the annealing process is time-consuming and needs to be carefully controlled. Recently, gallium-diffused waveguides supporting only the extraordinary wave have been proposed and are good alternatives for singly polarized waveguides [7]. In this letter, the Mach-Zehnder modulators fabricated by gallium-diffusion in a y-cut LiNbO substrate are presented.…”
Section: Introductionmentioning
confidence: 99%
“…The planar structure is usually used for optical components, integrated optic circuits, or optical interconnects [7]. Several methods for optical waveguide fabrications were reported using diffusion and ion exchange methods [8]- [10]. The methods have advantages each other, the optical waveguide propagation loss is one parameter to be considered furthermore.…”
Section: Introductionmentioning
confidence: 99%
“…Its piezoelectric, electrooptic, and photorefractive properties are utilized for designing of many technical applications, e.g., acoustic transducers, 1 electrooptic modulators, 2-4 optical waveguides, [5][6][7] and holographic memories, 8,9 to mention a few. Many researchers reported on the utilization of this crystal for producing wavelengthselective devices, such as optical filters 10,11 or Bragg reflection gratings ͑BRGs͒.…”
Section: Introductionmentioning
confidence: 99%