Gain and loss mechanisms for neutral species in low pressure fluorocarbon plasmas by infrared spectroscopy

Nelson, Caleb T.; Overzet, Lawrence; Goeckner, Matthew

doi:10.1116/1.4746411

Cited by 4 publications

(3 citation statements)

References 54 publications

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“…Since CF 4 formed a smaller percentage of the mixture, see table 9, we did not include the polymer deposition by CF x radicals. In addition to the F atom reactions, we added reactions of SF x radicals using the same reaction scheme as Kokkoris et al [294], see also comments on this work by Nelson et al [295].…”

Section: Eta Electron Total Attachmentmentioning

confidence: 99%

QDB: a new database of plasma chemistries and reactions

Tennyson

Rahimi

Hill

et al. 2017

Plasma Sources Sci. Technol.

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Section: Eta Electron Total Attachmentmentioning

confidence: 99%

QDB: a new database of plasma chemistries and reactions

Tennyson

Rahimi

Hill

et al. 2017

Plasma Sources Sci. Technol.

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show abstract

“…Since CF 4 formed a smaller percentage of the mixture, see Table 9, we did not include the polymer deposition by CF x radicals. In addition to the F atom reactions, we added reactions of SF x radicals using the same reaction scheme as Kokkoris et al [296], see also comments on this work by Nelson et al [297].…”

Section: Chemistry Construction and Validationmentioning

confidence: 99%

QDB: a new database of plasma chemistries and reactions

Tennyson,

Rahimi,

Hill

et al. 2017

Preprint

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One of the most challenging and recurring problems when modelling plasmas is the lack of data on key atomic and molecular reactions that drive plasma processes. Even when there are data for some reactions, complete and validated datasets of chemistries are rarely available. This hinders research on plasma processes and curbs development of industrial applications. The QDB project aims to address this problem by providing a platform for provision, exchange, and validation of chemistry datasets. A new data model developed for QDB is presented. QDB collates published data on both electron scattering and heavy-particle reactions. These data are formed into reaction sets, which are then validated against experimental data where possible. This process produces both complete chemistry sets and identifies key reactions that are currently unreported in the literature. Gaps in the datasets can be filled using established theoretical methods. Initial validated chemistry sets for SF 6 /CF 4 /O 2 and SF 6 /CF 4 /N 2 /H 2 are presented as examples.

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“…Gains can be limited to flow rate into the chamber, while losses can be confined to electron impact dissociation and the pump. 16 Gain and loss rates for c-C 4 F 8 can be calculated as…”

Section: C-c 4 Fmentioning

confidence: 99%

Role of surface temperature in fluorocarbon plasma-surface interactions

Nelson

Overzet

Goeckner

2012

Journal of Vacuum Science &Amp; Technology A: Vacuum, Surfaces, and Films

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This article examines plasma-surface reaction channels and the effect of surface temperature on the magnitude of those channels. Neutral species CF 4 , C 2 F 6 , and C 3 F 8 are produced on surfaces. The magnitude of the production channel increases with surface temperature for all species, but favors higher mass species as the temperature is elevated. Additionally, the production rate of CF 2 increases by a factor of 5 as the surface temperature is raised from 25 C to 200 C. Fluorine density, on the other hand, does not change as a function of either surface temperature or position outside of the plasma glow. This indicates that fluorine addition in the gas-phase is not a dominant reaction. Heating reactors can result in higher densities of depositing radical species, resulting in increased deposition rates on cooled substrates. Finally, the sticking probability of the depositing free radical species does not change as a function of surface temperature. Instead, the surface temperature acts together with an etchant species (possibly fluorine) to elevate desorption rates on that surface at temperatures lower than those required for unassisted thermal desorption.

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Gain and loss mechanisms for neutral species in low pressure fluorocarbon plasmas by infrared spectroscopy

Abstract: A hydrocarbon reaction model for low temperature hydrogen plasmas and an application to the Joint European

Cited by 4 publications

References 54 publications

QDB: a new database of plasma chemistries and reactions

QDB: a new database of plasma chemistries and reactions

QDB: a new database of plasma chemistries and reactions

Role of surface temperature in fluorocarbon plasma-surface interactions

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