Radio frequency (RF)-assisted excitation of a 150 µm diameter microdischarge device with an inductive LiNbO 3 transformer having a resonant frequency between 10 and 23 MHz is demonstrated. Fabricated with a thickness and surface area of ∼150 µm and ∼1 cm 2 , respectively, these piezoelectric transformers have a Q of typically 600-700, voltage step-up ratios >20, and produce RF voltages (peak-to-peak) in excess of 100 V. The application of this device to driving single microdischarges or arrays is discussed.