GaAs MEMS for Millimeter Wave Communications

Abstract

The paper presents the authors' contributions towards the development of millimeter wave circuits based on GaAs micromachining. The manufacturing and characterization of different type of millimeter wave GaAs membrane supported filter structures is presented. A fully monolithically integrated millimeter wave receiver module, having the antenna as well as the detecting Schottky diode on the same GaAs membrane is also presented.