2013
DOI: 10.1186/1556-276x-8-218
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GaAs-based resonant tunneling diode (RTD) epitaxy on Si for highly sensitive strain gauge applications

Abstract: As a highly sensitive strain gauge element, GaAs-based resonant tunneling diode (RTD) has already been applied in microelectromechanical system (MEMS) sensors. Due to poor mechanical properties and high cost, GaAs-based material has been limited in applications as the substrate for MEMS. In this work, we present a method to fabricate the GaAs-based RTD on Si substrate. From the experimental results, it can be concluded that the piezoresistive coefficient achieved with this method reached 3.42 × 10−9 m2/N, whic… Show more

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Cited by 12 publications
(6 citation statements)
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“…Resonant tunneling diodes are versatile optoelectronic devices with a multitude of possible applications ranging from fundamental research of noise correlations, high‐speed oscillators with operation frequencies in the terahertz regime, and novel neuromorphic computation schemes to highly sensitive measurement devices of physical quantities such as strain, temperature, or light …”
Section: Introductionmentioning
confidence: 99%
“…Resonant tunneling diodes are versatile optoelectronic devices with a multitude of possible applications ranging from fundamental research of noise correlations, high‐speed oscillators with operation frequencies in the terahertz regime, and novel neuromorphic computation schemes to highly sensitive measurement devices of physical quantities such as strain, temperature, or light …”
Section: Introductionmentioning
confidence: 99%
“…During the past few years, resonant tunneling diodes (RTDs) [1][2][3] have been increasingly deployed and investigated as sensors for various physical quantities, such as temperature [4], pressure [5], or light [6]. Of particular interest are RTDs with embedded quantum dots operated as single photon detectors and photon counters [7][8][9][10], or high-gain RTD photodetectors for room temperature telecommunication wavelength light sensing [11].…”
Section: Introductionmentioning
confidence: 99%
“…Firstly, monolithic integration chip with the GaAsbased optoelectronic and Si-based microelectronic devices has been realized. [1,2] Secondly, due to the brittleness and higher cost of GaAs wafers, GaAs/Si epilayers could replace GaAs substrates for applications in high-speed microelectronic [3][4][5] and optoelectronic devices. [6][7][8][9][10] Finally, optoelectronic integrated circuits on silicon chips attract ever-increasing attention in the need of high-bandwidth optical interconnects.…”
Section: Introductionmentioning
confidence: 99%