Ga doped ZnO thin films deposited by RF sputtering for NO₂ sensing

Abstract

Ga doped ZnO thin films have been deposited by Radio-Frequency (RF) magnetron sputtering on fused silica substrates. The structural analysis of the n-type sensitive material showed a preferential orientation in the [00l] direction. The microstructure of the thin film indicated an increasing grain size with the increase of the thicknesses. The micro sensor platforms have been fabricated with ZnO:Ga thin film deposited using a reliable stencil mask onto interdigitated electrodes containing micro-hotplates. The as fabricated micro sensor allowed to sense sub-ppm concentration (500 ppb) of nitrogen dioxide under cycled temperature mode. This system revealed promising sensing performance with a response R/R0 up to 18 at low temperature step (50 °C).

Spontaneous moisture-driven formation of Cs2Pb1-xMxCl2I2 single crystals with M = Bi, In, Ga and Cr

“…FWHM values systematically increase with dopant introduction. All doped samples therefore present a larger emission peak in comparison to the undoped phase, suggesting the introduction of energy levels inside the band gap of the 2D phase that increase the emission wavelengths, as described in previous works [47,60,61]. Garcia et al calculated that new absorption peaks would be noted in Cr-doped MAPbI 3 due to in gap band (IGB) concept [47].…”

Annealed Gallium-Doped Zinc Oxide (ZnO:Ga) Thin Films for Sub-ppm NO2 Sensing

“…The sensing properties of the produced devices were examined with a dilution gas test bench in synthetic air at 250 • C with a humidity level of 50%. This temperature was previously found to be the optimum temperature for NO 2 sensing for the studied ZnO:Ga material [1,2]. The devices were first electrically stabilized for 10 h in these conditions before the injection of a set of 6 pulses of NO 2 at 100 ppb (2 h in NO 2 , 2 h in synthetic air).…”

Development and Field Validation of Low-Cost Metal Oxide Nanosensors for Tropospheric Ozone Monitoring in Rural Areas

“…Three multisensor platforms (each platform contains 4 microhotplates) were coa with thin films of ZnO:Ga. One multisensor platform was coated with nanofibers of Sn Two types of nanostructured sensing layers were prepared on the top surface of the microhotplates. On the one hand, thin films of zinc oxide doped with gallium (ZnO:Ga) were grown by magnetron sputtering under pure argon from a self-made oxide target [62] on microhotplates, as shown in Figure 2. On the other hand, highly porous mats of nanofibers of tin dioxide (SnO 2 ) were deposited by electrospinning a polymeric solution containing a tin salt and eventually graphene (G) followed by calcination [63] on microhotplates, as displayed in Figure 1.…”