A detailed study aimed at investigating the interfacial structure of Cu films deposited on high purity aluminum nitride ͑AlN͒ substrate, which controls the adhesive strength of the deposited Cu film, is described. In this system, the Cu films are deposited by uniform coating of nanosized Cu 2 O particles onto the substrate, oxidation of Cu 2 O to CuO by heat-treatment in air, and subsequent reduction to metallic Cu followed by electroless Cu plating. Effect of the treatment condition on the structure of composite layer formed on the AlN substrate was investigated by means of X-ray diffraction, scanning electron microscopy, and transmission electron microscopy, which show that the interfacial structure depends significantly on the annealing conditions. Upon heattreatment above 800°C in air, an CuAl 2 O 4 and/or ␣-Al 2 O 3 phase is formed on the AlN surface. The adhesive strength of the deposited Cu film increased with increasing the annealing temperature, and maximum strength observed is ca. 4 kg per 2ϫ2 mm 2 ͑kg/4 mm 2 ͒, much greater than that obtained by conventional electroless plating process. The formation of an interfacial oxide layer is suggested to be responsible for high adhesive strength through chemical interaction. The use of Cu 2 O particles as deposition seeds having chemical bonding with AlN substrate can be crucial in this methodology, which has important implications for practical manufacture of Cu-based electronic devices fabricated on AlN substrate.Nanosized metal ͑oxide͒ particles have been of considerable interest because they can exhibit much higher catalytic reactivity than those of bulk materials. 1-4 The characteristics of the particles can be attributed to the increased ratio of surface to bulk atoms, providing enhancement of surface properties. Recently, metallization of insulating and/or dielectric materials with reasonable structural features has become central to developments in microelectronics technology, the most of these are conventionally performed by electroless plating, which utilizes Pd particles as catalyst for initiation of metal deposition because of its high catalytic activity. 5-12 Since the electroless plating method has advantages such as large-scale production, simplicity of process, and applicability to large and/or nonflat substrates in comparison with dry and screen printing processes, it is often carried out for manufacture of electronic devices, mainly fabrication of circuit line on insulating substrate. The use of nanosized particles is significantly crucial with respect to not only their catalytic activity but also uniform deposition of metal film, i.e., uniform dispersion of large amount of Pd particles adsorbed on insulator is possible. Pd particles are often deposited directly on insulators by means of sensitizing and subsequent activation processes. Metal films are then deposited on the treated insulator in electroless plating bath.The process of device fabrication requires high reliability in terms of adhesive strength of the metal films with substrate. It...