Fundamentals of Micro‐Manufacturing

Koç, Muammer; Özel, Tuğrul

doi:10.1002/9781118010570.ch1

Cited by 12 publications

(8 citation statements)

References 62 publications

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“…If reducing the sample size further to a grain size level, an increase of flow stress can be observed. That is because that at the grain size level each grain in the deformation zone participates into deformation while if specimen size is larger than grain size, grains in the deformation zone present selective deformation which lowers deformation resistance [16]. However, protective passivation oxidation layer generally has much higher deformation resistance than that of inner grains.…”

Section: Macro Hydroformingmentioning

confidence: 95%

Study on Micro Hydroforming of Metals

Luo

Jiang

Wei

et al. 2014

AMR

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Micro hydroforming has an ability to manufacture complex 3D micro parts at a high production rate and has drawn increasing attentions. Brief understanding of macro hydroforming, for instance, deep drawing, is necessary to understand the principle of micro hydroforming. Then, special phenomena, such as size effects, occurred at micro scale are discussed and the related theories explaining these phenomena are introduced. Based on the similarities and differences between micro and macro hydroforming, experiments and simulation which consider the size effects are reviewed. Abstract. Micro hydroforming owns ability to manufacture complex 3D micro parts at a high production rate and draws increasing attentions. Brief understanding of macro hydroforming, for instance, deep drawing, is necessary. Then, special phenomena, such as size effects, occurred at micro scale are discussed and relating theories explaining these phenomena are introduced. Based on the similarities and differences between micro and macro hydroforming, experiments and simulation which considers the size effects are reviewed.

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Section: Macro Hydroformingmentioning

confidence: 95%

Study on Micro Hydroforming of Metals

Luo

Jiang

Wei

et al. 2014

AMR

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“…It starts from small scale integrated (SSI) circuit to very large scale integrated (VLSI) circuit and then integration with microelectromechanical system (MEMS). Standard steps to fabricate MEMS like using microelectronic manufacturing methods such as photolithography, etching and deposition [1][2][3][4][5]. Further study should be carried out for looking alternative technique to produce 3 dimension (3D) micro-components with less cost, better durability, better surface roughness and better strength [6][7][8][9][10].…”

Section: Introductionmentioning

confidence: 99%

Process development and characterization towards microstructural realization using laser micromachining for MEMS

et al. 2020

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This paper presents the process development and characterization towards microstructural realization using laser micromachining for MEMS. Laser micromachining technique is environmental friendly, fast patterning and able to avoid multi steps in conventional lithography based microfabrication techniques. This research focuses on understanding the dimensional properties of materials of the laser beam on the silicon wafers where microstructures were fabricated. Four main parameters like rectangular variable aperture (RVA-XY) size, number of pulse, stage/table feed rate and laser energy play important role in laser ablation process. The pattern of the microchannel or line with 1 cm length was drawn by AutoCAD software or any CAD software. The pattern in the CAD software is then transferred onto the silicon wafer by using laser micromachining. Finally, high power microscope (HPM) and Stylus Profiler will be used as measurement tools for observing and analysing the width and depth of the microchannel structures fabricated by laser micromachining. When using bigger size of RVA, it will lead to bigger microchannel width. There are a little effects or almost comparable in term of microchannel depth if varying all parameters' value. Surface roughness test also needs to be considered before choosing the best setting for the laser ablation.

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“…Other processing methods like electrochemical deposition and photolithography are also being investigated for ceramic micro features. However, these methods are not easy to implement, involve chemical handling, and are associated with long processing times [3,4].…”

Section: Introductionmentioning

confidence: 99%

Effects of Laser Fluence and Pulse Overlap on Machining of Microchannels in Alumina Ceramics Using an Nd:YAG Laser

et al. 2019

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The quality of micro-features in various technologies is mostly affected by the choice of the micro-fabrication technique, which in turn results in several limitations with regard to materials, productivity, and cost. Laser beam micro-machining has a distinct edge over other non-traditional methods in terms of material choices, precision, shape complexity, and surface integrity. This study investigates the effect of laser fluence and pulse overlap while developing microchannels in alumina ceramic using an neodymium-doped yttrium aluminum garnet (Nd:YAG) laser. Microchannels 200 µm wide with different depths were machined using different laser peak fluence and pulse overlap (percentage of overlap between successive laser pulses) values. It was found that high pulse overlaps and fluences should be avoided as they give rise to V-shaped microchannels i.e., 100% bottom width errors. The optimal peak fluence range was found to be around 125–130 J/cm2 corresponding to 3–5 µm depth per scan. In addition, channels fabricated with moderate pulse overlap were found to be of good quality compared to low pulse overlaps.

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Fundamentals of Micro‐Manufacturing

Cited by 12 publications

References 62 publications

Study on Micro Hydroforming of Metals

Study on Micro Hydroforming of Metals

Process development and characterization towards microstructural realization using laser micromachining for MEMS

Effects of Laser Fluence and Pulse Overlap on Machining of Microchannels in Alumina Ceramics Using an Nd:YAG Laser

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