Fundamental Study on the SOx Gas Sensor Utilizing Beta-Alumina with Sputtered Praseodymium Oxide Thin Films.

Yao, Shinya; Miyagawa, Kenji; Iijima, Shigeru; Kozuka, Zensaku

doi:10.2473/shigentosozai.110.37

Shigen-to-Sozai(journal of the Mining and Materials Processing

1994

DOI: 10.2473/shigentosozai.110.37

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Fundamental Study on the SOx Gas Sensor Utilizing Beta-Alumina with Sputtered Praseodymium Oxide Thin Films.

Shinya Yao¹,

Kenji Miyagawa²,

Shigeru Iijima³

et al.

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Fundamental Study on the SOx Gas Sensor Utilizing Beta-Alumina with Sputtered Praseodymium Oxide Thin Films.

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