Fundamental Study on Side Surface Smoothing of Hole by Large-area EB Irradiation Method

Lu, Jiayu; Shinonaga, Togo; Inoue, Masaaki; OKADA, Akira

doi:10.1299/jsmelem.2021.10.066-035

LEM21

2021

DOI: 10.1299/jsmelem.2021.10.066-035

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Fundamental Study on Side Surface Smoothing of Hole by Large-area EB Irradiation Method

Jiayu Lu

Togo Shinonaga

Masaaki Inoue³

et al.

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Fundamental Study on Side Surface Smoothing of Hole by Large-area EB Irradiation Method

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