Fundamental Study of the Micro-Cantilever for more Sensitive Surface Stress-Based Biosensor

Abstract

Surface stress-based biosensors as a crucial part of micro-scale and label-free system, use free energy change, the underlying concept in any binding reaction, have been investigated extensively in recent years. In this paper, a new bi-micro-cantilever surface stress biosensor is proposed which can be used to detect cells. Some fundamental study has been done, especially for the micro-cantilever due to its crucial role in the whole system. To acquiring the optimal material for more sensitive sensor, four material, Si, SiN, AlN, PMMA(polymethylmethacrylate), were contrastively analyzed under the same conditions (loads, size, environmental factor. etc) by finite element (FE) method. This study could provide some foundation for the biosensor design and fabrication.