Fundamental characteristics of electrostatic wafer chuck with insulating sealant

Yatsuzuka, K.; Hatakeyama, F.; Asano, K.; Aonuma, Shigeru

doi:10.1109/28.833768

Cited by 51 publications

(33 citation statements)

References 3 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…However, then, this outcome is not uncommon, since several reports are readily available to support these results [5,6,13]. The existing model can only predict the quadratic F - V relation of such actuators within a certain voltage level.…”

Section: Resultsmentioning

confidence: 99%

Experimental Investigation of the Effect of the Driving Voltage of an Electroadhesion Actuator

2014

View full text Add to dashboard Cite

This paper investigates the effect of driving voltage on the attachment force of an electroadhesion actuator, as the existing literature on the saturation of the adhesive force at a higher electric field is incomplete. A new type of electroadhesion actuator using normally available materials, such as aluminum foil, PVC tape and a silicone rubber sheet used for keyboard protection, has been developed with a simple layered structure that is capable of developing adhesive force consistently. The developed actuator is subjected to the experiment for the evaluation of various test surfaces; aluminum, brick, ceramic, concrete and glass. The driving high voltage is varied in steps to determine the characteristics of the output holding force. Results show a quadratic relation between F (adhesion force) and V (driving voltage) within the 2 kV range. After this range, the F-V responses consistently show a saturation trend at high electric fields. Next, the concept of the leakage current that can occur in the dielectric material and the corona discharge through air has been introduced. Results show that the voltage level, which corresponds to the beginning of the supply current, matches well with the beginning of the force saturation. With the confirmation of this hypothesis, a working model for electroadhesion actuation is proposed. Based on the experimental results, it is proposed that such a kind of actuator can be driven within a range of optimum high voltage to remain electrically efficient. This practice is recommended for the future design, development and characterization of electroadhesion actuators for robotic applications.

show abstract

Section: Resultsmentioning

confidence: 99%

Experimental Investigation of the Effect of the Driving Voltage of an Electroadhesion Actuator

2014

View full text Add to dashboard Cite

show abstract

“…The novel DEA design shows advantage for grasping application over traditional DEA design as it can produce up to 10 times higher electroadhesion forces at the cost of only ~20 % reduction in actuation performance. The total electroadhesion force generated from our DEA design, a bilayer offset interdigitated electrodes, can be much higher (order of several times) by optimizing the electrode geometry such as the gap and the segmented electrode width, and the thickness of the passive layer (Figure 4b-c), as has been suggested in electroadhesion devices with single surface electrode [50,[52][53][54] . The sensing capability of the device (Supplementary Figure S2) makes it an active smart skin enabling shape recognition to understand the object geometry when such information cannot be provided.…”

Section: Accepted In Advanced Materialsmentioning

confidence: 92%

Versatile Soft Grippers with Intrinsic Electroadhesion Based on Multifunctional Polymer Actuators

et al. 2015

View full text Add to dashboard Cite

“…Among many different types of electrodes examined, interdigital electrodes show the best features [11]. A basic model that can adequately describe the performance of the interdigital electrodes is depicted in Fig.…”

Section: B Force Calculationmentioning

confidence: 99%

Design of a double-tracked wall climbing robot based on electrostatic adhesion mechanism

Chen

Liu

Shen

2013

2013 IEEE Workshop on Advanced Robotics and Its Social Impacts

View full text Add to dashboard Cite

A double-tracked wall climbing robot based on electrostatic adhesion mechanism is proposed in this paper. First, the principle of the electrostatic adhesion and a calculation method of the adhesion force are presented. Then, an electrode panel is designed to evaluate the feasibility of the electrostatic adhesion mechanism applied to wall climbing robot. Finally, the mechanical structure design and control system design of the robot prototype are described in detail. Experiments of the climbing performances of the robot on different wall surfaces are carried out, including the straight line movement and turning movement. The results show that the robot can achieve forward and backward movements along a straight line successfully. However, the robot can only achieve turning movement on the glass surface with a slope angle of approximately o 30 at present. Dramatic decrease of the dynamic adhesion force when the electrode panels on the robot side slip against the wall may be the main reason. The theoretical analysis and experimental results in this study will provide a strong support for the optimal design of wall climbing robots based on electrostatic adhesion mechanism in the future.

show abstract

Fundamental characteristics of electrostatic wafer chuck with insulating sealant

Cited by 51 publications

References 3 publications

Experimental Investigation of the Effect of the Driving Voltage of an Electroadhesion Actuator

Experimental Investigation of the Effect of the Driving Voltage of an Electroadhesion Actuator

Versatile Soft Grippers with Intrinsic Electroadhesion Based on Multifunctional Polymer Actuators

Design of a double-tracked wall climbing robot based on electrostatic adhesion mechanism

Contact Info

Product

Resources

About