1996
DOI: 10.1016/0040-6090(95)06954-2
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Fundamental aspects of SNMS for thin film characterization: experimental studies and computer simulations

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Cited by 18 publications
(6 citation statements)
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References 144 publications
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“…In turn, many atoms are simultaneously set in motion in the subsurface region, leading to high ejection yields of metal atoms and clusters. Such high action events have been observed by several authors ,, and, in particular, they have been pointed out by Betz and co-workers to explain the emission of large clusters under kiloelectronvolt particle bombardment. They are usually associated with significant damage in the sample. , …”
Section: Introductionmentioning
confidence: 82%
“…In turn, many atoms are simultaneously set in motion in the subsurface region, leading to high ejection yields of metal atoms and clusters. Such high action events have been observed by several authors ,, and, in particular, they have been pointed out by Betz and co-workers to explain the emission of large clusters under kiloelectronvolt particle bombardment. They are usually associated with significant damage in the sample. , …”
Section: Introductionmentioning
confidence: 82%
“…The experiments were carried out under UHV conditions with a base pressure of 10 −10 Torr. The UHV chamber was equipped with a reflectron type time‐of‐flight mass spectrometer,5–7 an ion gun and a high precision xyz target manipulator (shown in Figure 1). The whole vacuum system is baked out (for experiments with metal samples) for 24 h, so that the contaminants are released from the surfaces of the equipment.…”
Section: Experimental Partmentioning
confidence: 99%
“…For the secondary ion mass spectrometry (SIMS) experiments6 (noble gas or atomic metal projectile ions strike the surface at defined energies in the range 1–30 keV and eject secondary ions from the surface), the ion beam was incident on the target surface under an angle of 45° with respect to the target normal. The working gas was Xe.…”
Section: Experimental Partmentioning
confidence: 99%
“…2 For this purpose, it is necessary to understand the physical details of the ablation process and in particular, the ion to neutral ratio and the energy distribution of the ablated particles. 3 In a typical surface analysis method, particles are removed by primary radiation from the solid surface. 3 In the particular case discussed here, ultra short laser radiation is used for particle removal .…”
Section: Introductionmentioning
confidence: 99%
“…3 In a typical surface analysis method, particles are removed by primary radiation from the solid surface. 3 In the particular case discussed here, ultra short laser radiation is used for particle removal .…”
Section: Introductionmentioning
confidence: 99%