2016
DOI: 10.1088/2051-672x/4/2/024004
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Fundamental aspects of resolution and precision in vertical scanning white-light interferometry

Abstract: We discuss the height and lateral resolution that can be achieved in vertical scanning white-light interferometry (SWLI). With respect to interferometric height resolution, phase-shifting interferometry (PSI) is assumed to provide the highest accuracy. However, if the noise dependence of SWLI phase evaluation and PSI algorithms is considered, SWLI measurements can be shown to be more precise. With respect to lateral resolution, the determination of the coherence peak position of SWLI signals seems to lead to b… Show more

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Cited by 64 publications
(49 citation statements)
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References 26 publications
(36 reference statements)
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“…To obtain correct values of rates and their statistical distributions, a 7 × 7 median filter plus a de-spiking filtering process was applied before the material flux calculations using SPIP (Image Metrology A/S). This filter eliminates VSI data spikes that typically occur due to system inherent optical disturbance effects such as batwings and interferometric slope effects [29]. A typical example of the filtering process can be seen in Figure S3 of Supplementary Material.…”
Section: Surface Retreat Maps (∆H) Reaction Rate Maps (R) and Rate Smentioning
confidence: 99%
“…To obtain correct values of rates and their statistical distributions, a 7 × 7 median filter plus a de-spiking filtering process was applied before the material flux calculations using SPIP (Image Metrology A/S). This filter eliminates VSI data spikes that typically occur due to system inherent optical disturbance effects such as batwings and interferometric slope effects [29]. A typical example of the filtering process can be seen in Figure S3 of Supplementary Material.…”
Section: Surface Retreat Maps (∆H) Reaction Rate Maps (R) and Rate Smentioning
confidence: 99%
“…It should be possible to employ and improve automated instrument controls that are used in mechanized quality checks for some industrial processes 2 to simplify instrument use. The resulting surface profile images may also include imaging artifacts such as the batwing or interferometric slope effects 25 . While many of these effects can be corrected with appropriate filtering, over processing the data can also lead to filtering artefacts (such as vignetting) in the images and to misinterpretation of the data.…”
Section: Resultsmentioning
confidence: 99%
“…The interference fringes can be sensed for each surface point correlated to each pixel of the imaging camera. By vertically scanning the interferometric objective lens using a piezoelectric actuator, a surface topography map can be determined by finding the best equal-path condition at each pixel in the imaging camera [25,26].…”
Section: Coherence Scanning Interferometermentioning
confidence: 99%