2015
DOI: 10.1063/1.4934355
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Functional integrity of flexible n-channel metal–oxide–semiconductor field-effect transistors on a reversibly bistable platform

Abstract: CitationFunctional integrity of flexible n-channel metal-oxide-semiconductor field-effect transistors on a reversibly bistable platform 2015, 107 (17):174101 Applied Physics Letters

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Cited by 19 publications
(10 citation statements)
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References 44 publications
(45 reference statements)
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“…Aluminum and multilayer nickel/aluminum hard masks were also used to etch 200 µm deep trenches in silicon . The deep etching ability has enabled bulk micromachining to fabricate micromotors, electrostatic resonators, optical filters, microlenses, thermal actuators, MEMS switches, capacitive sensors, and actuators, and lately flexible and stretchable electronic devices …”
Section: Summary Of Key Deep Etching Work Over the Past Few Decadesmentioning
confidence: 99%
“…Aluminum and multilayer nickel/aluminum hard masks were also used to etch 200 µm deep trenches in silicon . The deep etching ability has enabled bulk micromachining to fabricate micromotors, electrostatic resonators, optical filters, microlenses, thermal actuators, MEMS switches, capacitive sensors, and actuators, and lately flexible and stretchable electronic devices …”
Section: Summary Of Key Deep Etching Work Over the Past Few Decadesmentioning
confidence: 99%
“…In recent years, the heterogeneous integration of a variety of inorganic materials for fabricating electronic and optoelectronic devices on sapphire 1, 2 and silicon (Si) [3][4][5][6][7][8] has shown clear promise in reshaping the future of the electronics industry. Additionally, the high thermal and chemical stability of the group III-nitride material system indicates its potential application in harsh environments in comparison to conventional silicon-based optoelectronic devices, which have limited operating temperature range and require extra protective packaging.…”
Section: Introductionmentioning
confidence: 99%
“…Consequently, by incorporating an out-of-the-ordinary mechanical behavior with high performing electronics, new and exciting technologies can be implemented for a large range of application such as bio-integrated systems, robotics, wearable electronics, among many others [13][14][15][16][17][18][19][20][21][22][23][24][25][26]. On the other hand, optimization in several materials via nanotechnology, as well as recent studies of novel, promising and potentially flexible 2-dimentional (2D) materials [27], have shown an important leap forward [28][29][30][31][32][33][34][35][36][37][38]; an energy harvesting device capable of electricity generation out of a temperature gradient, with the potential of reusing the high amounts of wasted heat as an alternative, environmentally friendly energy source [39][40][41].…”
Section: Introductionmentioning
confidence: 99%