2019
DOI: 10.1021/acsmacrolett.9b00585
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Functional Changes during Electron-Beam Lithography of Biotinylated Poly(ethylene glycol) Thin Films

Abstract: In contrast to photolithography where particular wavelengths of light can couple to specific photochemistries, electron-beam lithography can drive competing chemistries. To separate surface-grafting, cross-linking, and chemical functionality, we studied the effects of 2 keV electrons on thin films of poly(ethylene glycol) end-functionalized with hydroxyls (PEG-OH) or biotins (PEG-B). Similarities in the dose-dependent thickness changes of the patterned PEGs indicate that surface grafting and cross-linking prim… Show more

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Cited by 9 publications
(7 citation statements)
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“…The intensity is a maximum for 6 μC/cm 2 and is almost entirely absent for doses of 100 μC/cm 2 or more (Figure graph). This behavior is very consistent with a previous set of similar experiments . Notably, we observe no reactivity between SA and microgel pads made from PEG-OH using any dose (Figure bottom of left panel).…”
Section: Resultssupporting
confidence: 92%
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“…The intensity is a maximum for 6 μC/cm 2 and is almost entirely absent for doses of 100 μC/cm 2 or more (Figure graph). This behavior is very consistent with a previous set of similar experiments . Notably, we observe no reactivity between SA and microgel pads made from PEG-OH using any dose (Figure bottom of left panel).…”
Section: Resultssupporting
confidence: 92%
“…This behavior is very consistent with a previous set of similar experiments. 22 Notably, we observe no reactivity between SA and microgel pads made from PEG-OH using any dose (Figure 3 bottom of left panel). These observations indicate that the SA interaction is very specific to biotin.…”
Section: ■ Results and Discussionmentioning
confidence: 83%
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“…There is a tremendous amount of periodic surface relief patterns exhibiting a certain shape, dimension and function [ 37 , 38 , 39 , 40 , 41 , 42 , 43 ]. Such periodic patterns are mainly obtained from polymer-based systems (generally, polymers are cheap and yet highly processable materials) [ 44 , 45 , 46 , 47 ], through the use of various top-down and bottom-up methodologies [ 21 , 48 ].…”
Section: Common Lithographic Methods Used For Biopolymer Patterningmentioning
confidence: 99%
“…Nonetheless, the best contrast and sensitivity of the material has to be considered when choosing the appropriate resist for high-aspect ratio patterns [ 65 ] and when aiming at sub-20 nm resolution on both positive and negative tones resists [ 66 ]. Sometimes, depending on the resist type, EBL can also induce unwanted competing chemistries including surface-grafting or cross-linking or changes in chemical functionality [ 67 ]. For the preparation and optimization of the right resist, we advise our readers to follow suggestive examples given in the literature by Pfirrmann, Takei, and Wieberger and their collaborators [ 68 , 69 , 70 ].…”
Section: Top–down Lithographic Methodologiesmentioning
confidence: 99%