Terahertz wave manipulations, especially
the phase manipulations,
through metasurfaces has attracted considerable interests. Here, we
develop a terahertz beam steering device using the liquid-crystal
(LC)-integrated programmable metasurface. Specifically, a reflective-type
1 bit metasurface element is designed by employing a multilayer structure
composed of metallic back plate–LC–complementary split
ring resonator (CSRR). Numerical simulations show that, at the optimized
operation frequency of 0.675 THz, the developed metasurface element
has a nearly 180° phase difference between unbiased and biased
states with close reflection amplitudes. Furthermore, a one-dimensional
programmable metasurface array with 32 independently controlled subarrays
is designed and fabricated using the lithography technology. Both
simulated and measured far-field scattering patterns of the metasurface
certify the anomalous beam reflection and wide-angle beam steering
performances. Nevertheless, the optimal frequency red shifts to 0.645
THz in the experiment. This work may advance the application of metasurfaces
in terahertz beam manipulation devices.