Fully electronic DNA detection on a CMOS chip: device and process issues

Hofmann, Franz; Frey, Alexander; Holzapfl, B.; Schienle, M.; Paulus, Christian; Schindler-Bauer, P.; Kuhlmeier, Dirk; Krause, Jörg; Hintsche, R.; Nebling, Eric; Albers, Jörg; Gumbrecht, W.; Plehnert, K.; Eckstein, G.; Thewes, R.

doi:10.1109/iedm.2002.1175886

Cited by 24 publications

(10 citation statements)

References 2 publications

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“…Higher levels of integration have also been published [60][61][62][63]. There, detection methods based on target labeling are used: In the approach followed by researchers from the Hong Kong University of Technology and Science [60,61], the DNA target strands are labeled with gold nanoparticles and a silver enhancement step applied after the hybridization phase leads to a strong and drop of the ohmic resistance between interdigitated planar sensor electrodes in case hybridization events have occurred.…”

Section: Dna Manipulation and Detection With Microelectronic Chipsmentioning

confidence: 97%

“…The stack of the Au layer consists of Ti/Pt/Au with layer thicknesses of 50 nm/50 nm/500 nm each. A detailed discussion concerning processing issues is given elsewhere [63].…”

Section: Dna Manipulation and Detection With Microelectronic Chipsmentioning

confidence: 99%

“…In case of the fully electronic DNA detection chip from Infineon [62,63] an electrochemical method following the principles explained in [64] is applied. There, a standard 0.5 lm standard CMOS process is extended with additional process steps to provide sensor electrodes made of gold.…”

Section: Dna Manipulation and Detection With Microelectronic Chipsmentioning

confidence: 99%

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Microelectronic Chips for Molecular and Cell Biology

et al. 2003

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The development of microfabricated devices manufactured in silicon, glass, or plastic materials is a well-known trend in the research of novel biological techniques and tools over the last two decades, resulting in a multitude of start-up companies serving the pharmaceutical, biotechnology, and diagnostics markets. However, the idea of implementing such devices on microelectronic substrates has been introduced only recently. This chapter aims to describe the state-of-the-art of microsystems for molecular and cell biology produced in general purpose CMOS (complementary metal oxide semiconductor) technology, emphasizing the advantages of this approach along with their challenges and limitations. This chapter discusses significant examples of fully tested devices in comparison with existing state-of-the-art techniques.

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Section: Dna Manipulation and Detection With Microelectronic Chipsmentioning

confidence: 97%

“…The stack of the Au layer consists of Ti/Pt/Au with layer thicknesses of 50 nm/50 nm/500 nm each. A detailed discussion concerning processing issues is given elsewhere [63].…”

Section: Dna Manipulation and Detection With Microelectronic Chipsmentioning

confidence: 99%

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Microelectronic Chips for Molecular and Cell Biology

et al. 2003

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“…The W/L ratio can be moderate because the small current is achieved by the subthreshold gate voltage. The expression ln10 / S in (3) is generally much smaller than 2/(V G -V t ) in (2). Therefore, a required precision needs considerable lager area for the subthreshold operation.…”

Section: Calibration Enginementioning

confidence: 98%

“…Recently, a number of achievements along the way to fully electronic DNA chips have been published: Biocompatible interface-and transducer-materials were reliably integrated into a standard CMOS environment [1,2]. Arraycompatible high-precision analog pixel circuits suitable to process small current signals within a large dynamic range were presented in [1,3,4].…”

Section: Introductionmentioning

confidence: 99%

A Digital CMOS DNA Chip

Frey

Schienle

Paulus

et al.

2005 IEEE International Symposium on Circuits and Systems

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A fully electronic medium density DNA micro array is presented using a CMOS process extended by gold electrodes. The chip provides 128 sensor sites, in-sensor site current-mode A/D conversion, peripheral circuitry including bandgap and current references, D/A-converters to provide electrode bias voltages, calibration circuitry, and a 6 pin interface for power supply and serial digital data transfer.

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Capacitive Sensing Electrodes

Ghafar-Zadeh

2010

Analog Circuits and Signal Processing

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Fully electronic DNA detection on a CMOS chip: device and process issues

Cited by 24 publications

References 2 publications

Microelectronic Chips for Molecular and Cell Biology

Microelectronic Chips for Molecular and Cell Biology

A Digital CMOS DNA Chip

Capacitive Sensing Electrodes

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