Fully Differential Piezoelectric Button-Like Mode Disk Resonator for Liquid Phase Sensing

Ali, Abid; Lee, Joshua

doi:10.1109/tuffc.2018.2872923

Cited by 19 publications

(11 citation statements)

References 31 publications

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“…Equation ( 13) indicates that the TCF can be approximated as a constant for a given structure since S Si , k Si-AlN , and k Si-SiO 2 are all determined just by material properties and physical dimensions as shown in equations ( 6), (8), and (11). Also, it can be seen from equation ( 13) that either increasing the length (L Si ) or reducing the thickness (T Si ) of the tine can improve TCF.…”

Section: Theoretical Analysismentioning

confidence: 99%

“…Also, it has been reported that the power handling capability of TPoS resonators can be improved by increasing the thickness ratio of the substrate layer to the piezoelectric film [12]. All these advantages make the TPoS resonator a promising sensing unit in various sensor applications, such as mass sensor [6], inertial sensor [7], magnetometer [8], temperature sensor [9], humidity sensor [10], and liquid sensor [11].…”

Section: Introductionmentioning

confidence: 99%

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Highly Sensitive Temperature Sensor Based on Coupled-Beam AlN-on-Si MEMS Resonators Operating in Out-of-Plane Flexural Vibration Modes

Yang

Zhang³

et al. 2022

Research

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This paper reports a type of highly sensitive temperature sensor utilizing AlN-on-Si resonators with coupled-beam structures of double- and triple-ended-tuning-fork (D/TETF). For both resonators, the out-of-plane flexural mode is adopted as it favors the effect of thermal mismatch between the composite layers inherent to the AlN-on-Si structure and thus helps attain a large temperature coefficient of resonant frequency (TCF). The analytical model to calculate TCF values of D/TETF AlN-on-Si resonators is provided, which agrees well with the finite-element simulation and experimental results. The resonant temperature sensor is built by closing the loop of the AlN-on-Si resonator, a transimpedance amplifier, a low-pass filter, and a phase shifter to form an oscillator, the output frequency of which shifts proportionally to the ambient temperature. The measured sensitivities of the temperature sensors using D/TETF resonators are better than -1000 ppm/°C in the temperature range of 25°C~60°C, showing great potential to fulfill the on-chip temperature compensation scheme for cofabricated sensors.

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Section: Theoretical Analysismentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Highly Sensitive Temperature Sensor Based on Coupled-Beam AlN-on-Si MEMS Resonators Operating in Out-of-Plane Flexural Vibration Modes

Yang

Zhang³

et al. 2022

Research

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show abstract

“…The four triangular aluminium electrodes patterned on top of piezoelectric AlN aids the external circuit connections to actuate and sense the desired coupled Lamé mode (vibrating out-of-phase and in-phase) in the resonator array. It should also be noted that the parasitic feedthrough capacitance cancellation could be effectively implemented for the coupled Lamé mode through differential drive configuration [35].…”

Section: Coupled Mems Resonator Designmentioning

confidence: 99%

Weakly Coupled Piezoelectric MEMS Resonators for Aerosol Sensing

Chellasivalingam

Imran

Pandit

et al. 2020

Sensors

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This paper successfully demonstrates the potential of weakly coupled piezoelectric MEMS (Micro-Electro-Mechanical Systems) gravimetric sensors for the detection of ultra-fine particulates. As a proof-of-principle, the detection of diesel soot particles of 100 nanometres or less is demonstrated. A practical monitoring context also exists for diesel soot particles originating from combustion engines, as they are of serious health concern. The MEMS sensors employed in this work operate on the principle of vibration mode-localisation employing an amplitude ratio shift output metric for readout. Notably, gains are observed while comparing parametric sensitivities and the input referred stability for amplitude ratio and resonant frequency variations, demonstrating that the amplitude ratio output metric is particularly suitable for long-term measurements. The soot particle mass directly estimated using coupled MEMS resonators can be correlated to the mass, indirectly estimated using the condensation particle counter used as the reference instrument.

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“…But typically there is large parasitic feedthrough in MEMS resonators where the input drive signal is directly coupled to the output ports through parasitic elements. When reducing the physical dimensions of MEMS resonators to achieve higher resonant frequencies, or immersing the resonator into liquid as a sensor [10][11][12][13], the parasitic capacitive feedthrough between the input and output ports becomes increasingly dominant, and the electrical path passing through the capacitor results in a significant drop in SBR (signal-to-background ratio). The above situation causes a tremendous challenge to full electrical characterization of resonators in micron scale (and even more severe for nano scale).…”

Section: Introductionmentioning

confidence: 99%

Fully-Differential TPoS Resonators Based on Dual Interdigital Electrodes for Feedthrough Suppression

Zhang

Bao

et al. 2020

Micromachines

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As one of the core components of MEMS (i.e., micro-electro-mechanical systems), thin-film piezoelectric-on-silicon (TPoS) resonators experienced a blooming development in the past decades due to unique features such as a remarkable capability of integration for attractive applications of system-on-chip integrated timing references. However, the parasitic capacitive feedthrough poses a great challenge to electrical detection of resonance in a microscale silicon-based mechanical resonator. Herein, a fully-differential configuration of a TPoS MEMS resonator based on a novel structural design of dual interdigital electrodes is proposed to eliminate the negative effect of feedthrough. The fundamental principle of feedthrough suppression was comprehensively investigated by using FEA (i.e., finite-element analysis) modeling and electrical measurements of fabricated devices. It was shown that with the help of fully-differential configuration, the key parameter of SBR (i.e., signal-to-background ratio) was significantly enhanced by greatly suppressing the in-phase signal. The S-parameter measurement results further verified the effectiveness of this novel feedthrough suppression strategy, and the insertion loss and SBR of proposed TPoS resonators were improved to 4.27 dB and 42.47 dB, respectively.

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Fully Differential Piezoelectric Button-Like Mode Disk Resonator for Liquid Phase Sensing

Cited by 19 publications

References 31 publications

Highly Sensitive Temperature Sensor Based on Coupled-Beam AlN-on-Si MEMS Resonators Operating in Out-of-Plane Flexural Vibration Modes

Highly Sensitive Temperature Sensor Based on Coupled-Beam AlN-on-Si MEMS Resonators Operating in Out-of-Plane Flexural Vibration Modes

Weakly Coupled Piezoelectric MEMS Resonators for Aerosol Sensing

Fully-Differential TPoS Resonators Based on Dual Interdigital Electrodes for Feedthrough Suppression

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