Fully Automatic Wafer-Scale Micro/Nano Manipulation Based on Optically Induced Dielectrophoresis

Abstract

Optically induced dielectrophoresis (ODEP) has been proved experimentally as a powerful method for efficiently manipulating some micro-scale, or even nano-scale objects. However, few ODEP platforms have been demonstrated towards the fully automatic wafer-scale manipulation and rapid fabrication of micro and nano sensors and devices. That would be of great significance to the application and industrialization of micro and nano materials. In this paper, an innovative ODEP platform for reconfigurable and automatic micro/nano-scale material manipulation is presented by combining microactuation and microvision analysis with ODEP technology. The ODEP chip consists of a typical photoconductive layer of amorphous silicon, which generates a nonuniform electric field at the light-illuminated region to induce dielectrophoretic (DEP) force for manipulating particles within the chip. A high resolution 3D motorized stage enables an accurate and rapid movement of the chip in wafer-scale. The microvision analysis program automatically recognizes the positions and sizes of randomly distributed particles and creates direct image patterns to manipulate the selected particles to form a predetermined pattern in predesired position. The programmed dynamic reconfigurable optical patterns provide increased functionality and versatility in particle manipulation. The patterning of polystyrene beads with different sizes is accomplished. This platform may be promising for rapid and wafer-scale fabrication of micro and nano sensors and devices, high-throughput bio-sample pretreatment and other applications requiring massively parallel manipulation.

The electrodynamics of rod‐like microparticles based on optically induced dielectrophoresis

“…The optically induced dielectrophoresis (ODEP) technology is combined with a virtual electrode defined by light irradiating on the photoconductive materials to generate a nonuniform electric field to realize the manipulation of cells [29,30]. Compared to traditional electrophoretic techniques, ODEP discards the preparation of expensive metal electrode structures, and it uses advanced digital micromirror device to write the designed electrode patterns into a photoconductive material to mimic physical electrode [31,32], so called optical virtual electrode.…”

Manipulation of magnetic nanoparticles by optically induced dielectrophoresis

“…Mironov et al used magnetic force microscope (MFM) probe to control the chirality of a magnetic vortex in elliptical 400×600×27nm Co particles [12]. In recent years, an optically induced dielectrophoresis (ODEP) device was used to manipulate micro/nanoparticles [13][14], cells [15][16][17][18][19][20][21], DNA [23] and fabricate the micrometer-and nanometer scale polymer structures [22]. It can be realized with a sandwich structure of three layers including the photoconductive layer, the liquid layer with the sample and the indium tin oxide electrode (ITO) layer.…”