Full wave optical profilometry

Arhab, Slimane; Soriano, Gabriel; Belkebir, Kamal; Sentenac, Anne; Giovannini, Hugues

doi:10.1364/josaa.28.000576

Cited by 11 publications

(8 citation statements)

References 16 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…A normal height distribution and a Gaussian height spectrum are given to the roughness. With a slope root mean square that corresponds to an angle of 40°, this surface is far too rough to be inverted under the Fraunhofer approximation [12]. The profile is 60 μm long and sampled with 4096 points to compute the scattered field, which corresponds to data.…”

Section: Numerical Resultsmentioning

confidence: 99%

See 1 more Smart Citation

Full polarization optical profilometry

Arhab

Giovannini²,

Belkebir³

et al. 2012

J. Opt. Soc. Am. A

Self Cite

View full text Add to dashboard Cite

Optical digital tomographic microscopy can be used for profilometry. The profile of the surface can be estimated from measurements of the complex diffracted far field obtained when the sample is illuminated successively under various incidences. Outside the validity domain of perturbative theories of diffraction, the profile is determined by using an iterative inverse wave scattering numerical method. In this paper we show that, for perfectly conducting surfaces, the two fundamental polarization cases involve different distances of interaction in the multiple scattering phenomenon. The use of both polarization cases in the inversion process leads to a considerable improvement of the lateral resolution. Robustness to noise is also discussed.

show abstract

Section: Numerical Resultsmentioning

confidence: 99%

“…A preliminary study of the applicability of ODTM to profilometry in the resonance domain has been presented in a previous paper [12]. The importance of using a rigorous method for calculating the scattered field has been stressed, and it has been shown that ODTM can be applied when high lateral resolutions are required.…”

Section: Introductionmentioning

confidence: 99%

Full polarization optical profilometry

Arhab

Giovannini²,

Belkebir³

et al. 2012

J. Opt. Soc. Am. A

Self Cite

View full text Add to dashboard Cite

show abstract

“…Furthermore, care should be taken if multiple reflections occur, as for example for deep metallic samples. The reconstruction methods used here are no longer valid and a more complex scheme should be used to include the effect of multiple scattering, such as iterative reconstruction procedures based on rigorous wave diffraction [41]. Polarization effects are also taken into account by such approaches, which helps distinguish structures below the classical limit of resolution.…”

Section: Discussionmentioning

confidence: 99%

Tomographic diffractive microscopy and multiview profilometry with flexible aberration correction

et al. 2014

View full text Add to dashboard Cite

We have developed a tomographic diffractive microscope in reflection, which permits observation of sample surfaces with an improved lateral resolution, compared to a conventional holographic microscope. From the same set of data, high-precision measurements can be performed on the shape of the reflective surface by reconstructing the phase of the diffracted field. Doing so allows for several advantages compared to classical holographic interferometric measurements: improvement in lateral resolution, easier phase unwrapping, reduction of the coherent noise, combined with the high-longitudinal precision provided by interferometric phase measurements. We demonstrate these capabilities by imaging various test samples.

show abstract

“…This method was efficiently implemented in inverse scattering schemes for two-dimensional [6,16,17] and three-dimensional [18] scattering. However, one requisite of the method is that the incident field is a tapered wave, usually a gaussian beam.…”

Section: Introductionmentioning

confidence: 99%

Inverse Wave Scattering of Rough Surfaces With Emitters and Receivers in the Transition Zone

Arhab

Soriano²

2016

PIER M

View full text Add to dashboard Cite

Abstract-We deal with the problem of determining the profile of a perfectly conducting rough surface from single-frequency and multistatic data. The two fundamental polarizations are investigated, in a two-dimension scattering configuration. Emitting and receiving antennas are positioned on a probing line some wavelengths above the profile. It is shown how the boundary integral equation method can be adapted to the case where the antenna footprint is much wider that the rough part of the profile. The Newton-Kantorovich iterative inversion process is then performed on these synthetic data. Its accuracy and robustness to additive noise are studied in the context of random rough surfaces with correlation length smaller than the wavelength and slope root mean square up to 0.9.

show abstract

Full wave optical profilometry

Cited by 11 publications

References 16 publications

Full polarization optical profilometry

Full polarization optical profilometry

Tomographic diffractive microscopy and multiview profilometry with flexible aberration correction

Inverse Wave Scattering of Rough Surfaces With Emitters and Receivers in the Transition Zone

Contact Info

Product

Resources

About