Full-field structured-illumination super-resolution X-ray transmission microscopy

Günther, Benedikt; Hehn, Lorenz; Jud, Christoph; Hipp, Alexander; Dierolf, Martin; Pfeiffer, Franz

doi:10.1038/s41467-019-10537-x

Cited by 13 publications

(5 citation statements)

References 29 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Such a high sensitivity allows the resolution of 20 nm sized details in integrated circuits. [113] But X-ray ptychography [114] and a variety of other high sophisticated X-ray microscopy and diffraction based imaging methods [115,116,117] are another story, which would go beyond the scope of this article.…”

Section: Discussionmentioning

confidence: 99%

X‐Ray Topography—More than Nice Pictures

Danilewsky

2020

Crystal Research and Technology

View full text Add to dashboard Cite

X‐ray topography—a well‐known diffraction imaging method—is widely used for the characterization of extended crystal defects like dislocations. Herein, the progress toward the quantification besides the number and nature of dislocations is given. The diffracted images include additional information about tilt and strain, which can be measured in real‐time, thanks to the improved digital detection systems. This allows not only the fast mapping of huge samples like 450 mm diameter Si wafers, the in situ observation of the dislocation, or crack dynamics at high temperatures, but also the stress analysis in electronic devices in operando. In addition to typical white X‐ray beam methods like stacks of section topographs, the monochromatic diffraction laminography allows a 3D representation of the dislocation arrays. The merits and limitations of X‐ray topography are demonstrated by semiconductor materials as an example.

show abstract

Section: Discussionmentioning

confidence: 99%

X‐Ray Topography—More than Nice Pictures

Danilewsky

2020

Crystal Research and Technology

View full text Add to dashboard Cite

show abstract

“…Beyond high-resolution or single-shot dynamic phase imaging, the discussed TAIs can be also used in wavefront sensing, x-ray optics characterization, adjustment and focusing of scintillator screens in 3D, or for recently demonstrated full-field structured illumination super-resolution x-ray microscopy [ 19 , 43 ]. Using high power, laboratory-based x-ray sources with absorptive source gratings [ 5 ], the discussed TAIs may be also used in medical Talbot-Lau-based imaging systems to gain bi-directional sensitivity and increased visibility with shorter setups compared to conventional binary symmetric phase gratings.…”

Section: Discussionmentioning

confidence: 99%

High-resolution and sensitivity bi-directional x-ray phase contrast imaging using 2D Talbot array illuminators

Gustschin

Riedel

Taphorn

et al. 2021

Optica

View full text Add to dashboard Cite

Two-dimensional (2D) Talbot array illuminators (TAIs) were designed, fabricated, and evaluated for high-resolution high-contrast x-ray phase imaging of soft tissue at 10–20 keV. The TAIs create intensity modulations with a high compression ratio on the micrometer scale at short propagation distances. Their performance was compared with various other wavefront markers in terms of period, visibility, flux efficiency, and flexibility to be adapted for limited beam coherence and detector resolution. Differential x-ray phase contrast and dark-field imaging were demonstrated with a one-dimensional, linear phase stepping approach yielding 2D phase sensitivity using unified modulated pattern analysis (UMPA) for phase retrieval. The method was employed for x-ray phase computed tomography reaching a resolution of 3 µm on an unstained murine artery. It opens new possibilities for three-dimensional, non-destructive, and quantitative imaging of soft matter such as virtual histology. The phase modulators can also be used for various other x-ray applications such as dynamic phase imaging, super-resolution structured illumination microscopy, or wavefront sensing.

show abstract

“…Beyond high-resolution or single-shot dynamic phase imaging, the discussed TAIs can be also used in wavefront sensing, x-ray optics characterization, adjustment and focusing of scintillator screens in 3 dimensions, or for recently demonstrated fullfield structured illumination super-resolution x-ray microscopy [19,41]. Using high power, laboratory-based x-ray sources with absorptive source gratings [5], the discussed TAIs may be also used in medical Talbot-Lau-based imaging systems to gain bidirectional sensitivity and increased visibility with shorter setups compared to conventional binary symmetric phase gratings.…”

Section: Discussionmentioning

confidence: 99%

High resolution and sensitivity bi-directional x-ray phase contrast imaging using 2D Talbot array illuminators

Gustschin¹,

Riedel²,

Taphorn³

et al. 2021

Preprint

View full text Add to dashboard Cite

Two-dimensional Talbot array illuminators (TAIs) were designed, fabricated, and evaluated for high-resolution high-contrast x-ray phase imaging of soft tissue at 10-20 keV. The TAIs create intensity modulations with a high compression ratio on the micrometer scale at short propagation distances. Their performance was compared with various other wavefront markers in terms of period, visibility, flux efficiency and flexibility to be adapted for limited beam coherence and detector resolution. Differential x-ray phase contrast and dark-field imaging were demonstrated with a one-dimensional, linear phase stepping approach yielding two-dimensional phase sensitivity using Unified Modulated Pattern Analysis (UMPA) for phase retrieval. The method was employed for x-ray phase computed tomography reaching a resolution of 3 µm on an unstained murine artery. It opens new possibilities for three-dimensional, non-destructive, and quantitative imaging of soft matter such as virtual histology. The phase modulators can also be used for various other x-ray applications such as dynamic phase imaging, super-resolution structured illumination microscopy, or wavefront sensing.

show abstract

Full-field structured-illumination super-resolution X-ray transmission microscopy

Cited by 13 publications

References 29 publications

X‐Ray Topography—More than Nice Pictures

X‐Ray Topography—More than Nice Pictures

High-resolution and sensitivity bi-directional x-ray phase contrast imaging using 2D Talbot array illuminators

High resolution and sensitivity bi-directional x-ray phase contrast imaging using 2D Talbot array illuminators

Contact Info

Product

Resources

About