Full-color monolithic hybrid quantum dot nanoring micro light-emitting diodes with improved efficiency using atomic layer deposition and nonradiative resonant energy transfer

Chen, Sung Wen Huang; Shen, Chien Chang; Wu, Tingzhu; Liao, Zhen You; Chen, Lee Feng; Zhou, Jia; Lee, Chun Fu; Lin, Chien-Chung; Sher, Chin Wei; Lee, Po-Tsung; Tzou, An Jye; Chen, Zhong; Kuo, Hao‐Chung

doi:10.1364/prj.7.000416

Cited by 124 publications

(71 citation statements)

References 29 publications

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“…The most commonly used routes to fabricate these devices involve epitaxial growth of red, green, and blue (RGB) active materials on different substrates followed by chip fabrication, wafer dicing, and pick-and-place robotic manipulation into individually packaged components for interconnection by bulk wire bonding. However, dicing becomes more difficult as the chip size decreases beyond 100 µm × 100 µm, and integrating them on the same thin-film transistor-based glass substrates through mass transfer, which requires precise alignment for each pixel, becomes a challenge [5][6][7]. Moreover, the light-emission efficiencies and degradation rates of RGB micro LEDs are different; as a result, a complicated driving circuit may be needed to maintain the color-rendering index during operation.…”

Section: Introductionmentioning

confidence: 99%

High-Performance Color-Converted Full-Color Micro-LED Arrays

et al. 2020

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Color-converted micro-LED displays consisting of mono-blue-colored micro LED arrays and color-conversion materials have been used to achieve full color while reliving the transfer and epitaxial growth of three different-colored micro LEDs. An efficient technique is suggested to deposit the color-conversion layers on the blue micro LEDs by using a mixture of photo-curable acrylic and nano-organic color-conversion materials through the conventional lithography technique. This study attempts to provide a solution to fabricate full-color micro-LED displays.

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Section: Introductionmentioning

confidence: 99%

High-Performance Color-Converted Full-Color Micro-LED Arrays

et al. 2020

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“…Hence, the colorconversion from NR-μLEDs to QDs enables a good property and guide to a great color feature of hybrid QDs μLEDs. [7]. Figure 1 shows the sketch of the process flow of the hybrid QD-NR-μLEDs and the cross-section view of the completed device.…”

Section: Introductionmentioning

confidence: 99%

“…(a) PL emission spectra of NR-μLEDs with and without ALD. (b) TD-TRPL curves of NR-μLEDs with and without ALD passivation at 15K and 300K[7].…”

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confidence: 99%

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20.1: Invited Paper: Monolithic Full‐color Quantum Dot Nanoring Micro LEDs with Improved Efficiency

Sher

Chen

et al. 2019

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Full‐color displays based on micro light‐emitting diodes (µLEDs) have gained expanding research interest. In the study, nano‐ring (NR) structures are fabricated in certain regions on a green LED epitaxial wafer, and the color of NR‐µLEDs can be tuned from green to blue duo to the strain relaxation. In order to improve the luminous efficiency of NR‐µLEDs, atomic layer deposition technique is utilized to deposit an Al2O3 layer on the sidewall of NR‐µLEDs. As a result, the photoluminescence intensity is significantly improved by 143.7 %. Moreover, red quantum dots (QDs) are sprayed on some blue NR‐µLEDs to achieve the RGB full‐color display. Because QDs are directly contacted with quantum wells of NR‐µLEDs, the color conversion efficiency of QDs can be improved by the non‐radiative energy transfer phenomenon. To further improve the color purity of the red light, a distributed Bragg reflector (DBR) is developed to recycle the excitation light. This study can achieve the full‐color display on a monolithic epitaxial wafer, providing a novel and feasible method for realizing micro‐displays.

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