2013
DOI: 10.1063/1.4798238
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Full band calculations of the intrinsic lower limit of contact resistivity

Abstract: The intrinsic lower limit of contact resistivity (q LL c) for InAs, In 0:53 Ga 0:47 As, GaSb, and Si is calculated using a full band ballistic quantum transport approach. Surprisingly, our results show that q LL c is almost independent of the semiconductor. An analytical model, derived for 1D, 2D, and 3D, correctly reproduces the numerical results and explains why q LL c is very similar in all cases. Our analysis sets a minimal carrier density required to meet the International Technology Roadmap for Semicondu… Show more

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Cited by 37 publications
(26 citation statements)
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“…The in-plane thermoelectric properties of single-and double-layer MoS 2 are calculated using the Landauer transport formalism, which is equivalent to solving the Boltzmann equation in the case of diffusive transport 26,[40][41][42][43] . Here, we will briefly describe our approach to calculate the Seebeck coefficient and electrical conductivity using the full band dispersions obtained from the first-principles density functional theory (DFT).…”
Section: A2 Landauer Formalismmentioning
confidence: 99%
“…The in-plane thermoelectric properties of single-and double-layer MoS 2 are calculated using the Landauer transport formalism, which is equivalent to solving the Boltzmann equation in the case of diffusive transport 26,[40][41][42][43] . Here, we will briefly describe our approach to calculate the Seebeck coefficient and electrical conductivity using the full band dispersions obtained from the first-principles density functional theory (DFT).…”
Section: A2 Landauer Formalismmentioning
confidence: 99%
“…From an atomistic modeling standpoint, Maassen et al 4 recently reported the lower limits of contact resistivity in Si using full band Tight Binding (TB) calculations. They report specific contact resistivities in the low 10 −11 Ω-cm 2 range at doping concentrations close to the solubility limit of P in Si (N d ≈ 7×10 20 cm −3 ) 5 .…”
mentioning
confidence: 99%
“…Figure 2 shows the transmission spectra that arise as a result of such a coupling for the two interface orientations considered in this work. Once the transverse momentum-resolved transmission spectra for the coupled interface are computed under the assumptions outlined above, the number of available conducting modes per unit cross sectional area as a function of energy E in Si, M (E), is simply calculated as per the mode-counting formalism outlined in Maassen et al 4 .…”
mentioning
confidence: 99%
“…According to the ITRS roadmap [1], the maximum specific contact resistivity ρ c is required to be 1.5 × 10 −9 Ω.cm 2 by 2028 to meet the overall parasitic resistance requirement in the silicon (Si) MOSFET devices. In a theoretical study on the intrinsic limit of the contact resistivity within the ballistic trasport limit, it has been shown that the ITRS target is indeed possible from a theoretical perspective in a moderate doping density range for Si [2]. Yet, the lowest specific contact resistivity reported in an experiment so far for the p-type metal-semiconductor (M-S) contact (Pt-Si) is ρ c = 1.9×10 −9 Ω.cm 2 [3].…”
Section: Introductionmentioning
confidence: 99%