FTIRAS study of vapor deposited pyromellitic dian-hydride and oxydianiline and their solid-state reaction to polyimide on Pt (111)

Integration of vapor deposited polyimide into a multichip module packaging process

“…2, top), these modes are barely visible in the uncured vapor deposited film. These results, in accord with previous work [4], [6], suggest that as-deposited VDP material is a low-molecular weight mixture of partially reacted monomers.…”

“…Previous VDP studies of the PMDA/ODA system concentrated on understanding the fundamental properties of such films and reaction pathways for their formation. In these studies, films were deposited over a few square centimeters [3], [4] throughput and spatial uniformity has been attempted. In this work, we describe a robust high throughput VDP process of PMDA/ODA polyimide, capable of forming coatings both on top and sides of a die with excellent uniformity over three 4-in diameter substrates simultaneously.…”

A Kinetic Study of the Mechanism of the Solid-State Reaction between Pyromellitic Dianhydride (PMDA) and Oxydianiline (ODA)

“…In Figure the FTIR spectrum of a PMDA−ODA film deposited at −100 °C and then annealed at −28 °C for a few hours is shown. The assignment of the numbered IR peaks appearing in Figure is given in Table and was made according to refs and . Features attributed to the reaction products and the reactants are clearly apparent.

2 IR spectrum of a 270 nm thick PMDA−ODA film deposited at −100 °C and then left at −28 °C for a few hours.

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“…The prominent peaks due to ODA are mainly attributed to the phenyl ring vibrational modes and thus are not affected by any reaction of the amine end groups. When ODA and PMDA are codeposited on a substrate, the region between 3300 and 3500 cm -1 , where the primary amine stretching modes normally appear, exhibits two very broad bands, , which are not useful for quantitative measurements. These bands are broadened and lose intensity as compared to the pure ODA films, due to the perturbation of the ODA molecules when codeposited with PMDA, mainly due to the various kinds of neighboring moieties to the amine groups.…”

“…This is not the case for the amine functional groups of ODA (two per ODA molecule). Some of the reacted anhydride groups form an amine carboxylate salt besides forming an amide linkage (Figure , structure I). , Hence, two amine groups belonging to two different ODA molecules are consumed by each of these anhydride groups. Eventually, a deficiency of amine groups is created relative to anhydride.…”